1980Di can be used for 14nm production. SMEE first prototype cant. but i am hearing 14nm capable has been made.PROTOTYPE SMEE 800A = ASML NXT 1980i
Final SMEE 800 GAI iteration being mass produce = ASML NXT 2000i
From the grapevine the latest SMEE 900A 22 nm DUVL is analogous to NXT2050i, will it be introduced this year? together with the expected Chinese EUVL? As we all know where the priority lays as the Chinese race to compete with TSMC especially on the latest node. So yes the urgency for deploying this latest DUVL may lessened or may never be.
1980Di NA =1.35 14nm capable
2000i NA=1.35 7nm capable
2050i NA=1.35 7nm capable higher throughput.
Last edited: