Tuojing Technology (688072) is a leading domestic company in specialized mass production of PECVD, ALD, SACVD, HDPCVD, ultra-high aspect ratio trench filling CVD and hybrid bonding equipment. As of the end of June 2024, Tuojing Technology has undertaken a total of 9 major national projects (topics) and has been rated as one of the "Top Five Chinese Semiconductor Equipment Companies" by the China Semiconductor Industry Association many times.
Thanks to the fact that Tuojing Technology has always been deeply involved in the field of high-end semiconductor special equipment and focused on the research and development and industrialization of thin film deposition equipment and hybrid bonding equipment, the company's products are highly recognized by domestic customers.
"As of the end of June 2024, the company has shipped more than 1,940 reaction chambers and entered more than 70 production lines. It is expected that the company will ship more than 1,000 reaction chambers in 2024, which will set a historical record." said Lv Guangquan, chairman of Tuojing Technology.
Since its establishment in 2010, Tuojing Technology has been focusing on the field of high-end semiconductor equipment. With the two former chairmen as the core, it has established an international technical team of national-level overseas high-level experts, deeply engaged in the field of thin film deposition, and gradually formed three categories of semiconductor thin film equipment product series (PECVD equipment, ALD equipment and trench filling series equipment), and subsequently expanded hybrid bonding equipment.
"At the beginning of the company's establishment, we relied on major national science and technology projects to develop 12-inch PECVD equipment and launched it to the market, realizing the industrial application of PECVD equipment. In this process, the company mastered the core technology of PECVD thin film deposition equipment and accumulated experience from research and development to industrialization of equipment products." Lu Guangquan introduced.
After achieving a breakthrough from "0 to 1" in the field of thin film deposition equipment, Tuojing Technology began to gradually form a product layout from "1 to N". Tuojing Technology has successively developed and launched ALD equipment, SACVD equipment, HDPCVD equipment, and ultra-high aspect ratio trench filling CVD equipment, broadening the company's thin film equipment product types and process coverage. In addition to thin film deposition products, facing new technological trends and market demands, Tuojing Technology has also actively laid out and successfully entered the cutting-edge technology field of high-end semiconductor equipment, and launched a series of hybrid bonding equipment products for wafer-level three-dimensional integration.
After more than ten years of innovative development, the company's PECVD, ALD, SACVD, HDPCVD, ultra-high aspect ratio trench filling CVD, hybrid bonding and other equipment products have successively passed customer verification, entered customer mass production lines, and continuously expanded the scale of mass production. At present, Tuojing Technology has R&D and industrialization bases in Shenyang, Shanghai and Haining
. The annual production capacity of the Shenyang No. 1 Plant R&D and production base is about 300-350 sets, the production capacity of the Shanghai Lingang No. 1 Plant R&D and industrialization base is about 80 sets, and the Shanghai Lingang No. 2 Plant (under construction) R&D and industrialization base supports an annual production capacity of about 400 sets. Tuojing Technology is currently planning the construction of the Shenyang No. 2 Plant industrialization base to provide production capacity support for the company's subsequent development. The Shanghai Lingang No. 2 Plant under construction is expected to be put into use in the first half of 2025.
It is particularly worth mentioning that the semiconductor thin film deposition equipment focused on by Tuojing Technology, together with the lithography machine and etching machine, constitute the three main equipment for chip manufacturing. As of the end of June 2024, Tuojing Technology has successively undertaken 9 major national projects (topics) and has been rated as one of the "Top Five Chinese Semiconductor Equipment Enterprises" by the China Semiconductor Industry Association many times.