CFMEE launched a new litho machine for advance packaging.
PLP 3000 Direct Write Lithography Machine
It adopts advanced DMD digital lithography technology, without mask, and can directly transfer layout information to a substrate coated with photoresist. It is mainly used in the board-level back-end field, including FC CSP, FC BGA, Fan-In PLP, Fan-Out PLP and 2.5D/3D and other back-end packaging forms. It can support copper-clad laminates, composite materials, and glass substrates. The system adopts multi-optical engine parallel scanning technology, with automatic edge alignment, automatic focus tracking, intelligent deviation correction, and WEE/WEP functions, and has obvious advantages in RDL, UBM, TSV and other process technologies.