Tools are not LEGOs.
Except the US government will apply pressure to ASML to prevent this from happening.
China should just shed light on the fact that the US is monopolizing the chip sector by force by using what levers it has. And that this can be used against Europe, Japan, South Korea, or Taiwan too. That the US seeks to undermine their own industries as well. It is as simple as that.
In the long term China has roughly a third of global chipmaking capacity, like half the chip demand, and that market will be self-sustainable. Just the sheer gravitational pull of the sector in China is irresistible. Talk that a single country cannot encompass the whole supply side of chipmaking is hogwash. Japan could basically make it and they have like a tenth the population of China. So what if the machines are complex. So are jet engines and China is getting there. Just like they did with high-speed rail, solar power, EVs, space launchers, and other sectors.
The goal should be to go full domestic in everything that could be impacted by sanctions. It is not the most efficient way of doing things but anything else is a risk.
If China fulfills its main goal of full domestication then economy of scale alone will make exports a major side benefit somewhere down the line. Do worry about international competitiveness just. Size of market and the cutthroat internal competitiveness means that whomever comes out of that ecosystem will ensure no industry is too far behind.
China is not the USSR. Even when attacked in a tech and trade war fron West, China is expanding as the world's largest trading nation.
Go 100% domestic in chips, in autos, in aircraft, in games, in everything. And all will fall into place.
That domestic market is immensely powerful. The world's largest in cars and practically all major consumer items a modern population is expected to purchase. Chinese buys at multiples of the US. Uses electricity at multiples of the US.
Think about this, China's airliners market is 99.9% foreign. Just making that more domestic will engage huge amounts of coming growth.