The self-sufficiency rate of high-end equipment increases, and the semiconductor equipment leader opens up a new pattern with new technology
In recent years, domestic semiconductor equipment has achieved a qualitative leap from nothing to something, from weak to strong. my country's semiconductor industry ecology and manufacturing system have been continuously improved, and the self-sufficiency rate of domestic high-end equipment has gradually increased.
As a gathering place for my country's "hard technology" enterprises, the Science and Technology Innovation Board has formed an integrated circuit industry cluster with a market value of over one trillion yuan, with more than 110 listed companies, accounting for more than 60% of the number of A-share listed companies in the same industry. Among them, semiconductor equipment listed companies cover multiple key links in semiconductor manufacturing, such as etching, thin film deposition, CMP, testing, cleaning, coating and development. At the meeting, many company leaders talked about the development history and achievements of my country's semiconductor equipment in combination with their respective sub-sectors.
Yin Zhiyao, Chairman and General Manager of AMEC, said that the company is committed to becoming a platform-based enterprise covering high-end key equipment such as etching and thin film. At present, etching equipment has been widely used in integrated circuit processing and manufacturing production lines at home and abroad, and a number of newly developed thin film equipment has also quickly entered the market. In addition, AMEC has also formed a good cluster synergy effect through investment in integrated circuits and pan-semiconductor complete equipment, as well as key components in the upstream and downstream of the supply chain.
Tuojing Technology focuses on the research and development and industrialization of semiconductor thin film deposition equipment and hybrid bonding equipment. "The company's PECVD, SACVD, and HDPCVD equipment process types have been fully covered, which can support all dielectric film materials and more than 100 process applications required in logic chips and memory chips. The company's newly launched wafer-to-wafer hybrid bonding equipment is the first hybrid bonding equipment used in mass production in my country." said Lv Guangquan, chairman of the company.
Huahai Qingke launched the first 12-inch chemical mechanical polishing (CMP) equipment in China. Zhang Guoming, general manager of the company, said that based on CMP, the company has expanded into thinning equipment, dicing equipment, wet equipment, wafer regeneration, key consumables and maintenance services, and has initially realized the platform-based strategic layout of "equipment + service".
Zhongke Feiteng focuses on the field of high-end semiconductor quality control. Chen Lu, chairman and general manager of the company, said that the company has formed a product portfolio of nine series of equipment and three series of intelligent software, which can meet the optical inspection and measurement needs of mainstream domestic customers.
Rationally look at the advantages and disadvantages of current development "At present, there are hundreds of semiconductor equipment companies in China, and more than 20 of them are relatively mature. Behind this are sufficient financial support, accumulation of high-end R&D talents, and new-quality production relations that match new-quality productivity," said Yin Zhiyao.
Lu Guangquan believes that the advantage of domestic semiconductor equipment companies lies in the fact that the company's management and technical teams are closer to major customers and can provide efficient technical support and after-sales service; they must increase their efforts to continue to innovate and continuously narrow the technological gap with foreign manufacturers through research and development.
Zhang Guoming believes that domestic equipment has certain advantages in technical support capabilities for key processes, production capacity and product delivery guarantee, and production costs, so standards should not be lowered. "But at the same time, there are deficiencies in domestic verification conditions and process data accumulation, and some equipment has homogeneity problems, internal friction is serious, and competition is fierce," he said.
Chen Lu said that the performance indicators of China Science and Technology Atomic Test equipment are highly competitive, but there is still a certain gap with foreign manufacturers in terms of corporate scale, brand awareness, etc., and it needs to iterate quickly and catch up. New technology may open up a new pattern The semiconductor industry has always been characterized by "one generation of equipment, one generation of process, one generation of product". At present, driven by a new round of scientific and technological revolution and industrial transformation, what are the new technologies and processes that may have a disruptive impact on the future semiconductor industry?
Yin Zhiyao proactively proposed a number of cutting-edge technology fields, including three-dimensional devices, AI applications, and brain science. He said that AMEC will seize the market opportunity of industrial upgrading and give full play to the advantages of China in equipment links such as etching and thin film deposition.
"With the advent of the 'post-Moore era', the semiconductor industry no longer relies solely on shortening process limits to achieve optimal chip performance and complex chip structures, but instead turns to new chip design architectures and chip stacking methods to achieve this, which has created new equipment requirements, namely hybrid bonding equipment," Lu Guangquan believes.
Huahai Qingke and Zhongke Feice expressed their concern about advanced packaging technologies such as chiplets and HBM. Zhang Guoming said that the surge in demand for cloud computing, AI computing power, and new energy has given rise to advanced packaging technologies and processes such as chiplets and HBM based on 2.5D and 3D packaging technologies. Huahai Qingke's main CMP equipment and thinning equipment are key core equipment for chip stacking technology and advanced packaging technology, and will be more widely used.
"AI applications have brought many technological innovations to integrated circuit manufacturing, including 2.5D and 3D packaging used in HBM, which have put forward higher requirements for detection and measurement equipment. China Science and Technology Feiteng already has product applications and plans in related fields." Chen Lu introduced.
When talking about the company's future development strategy, "internationalization" became a common topic. Yin Zhiyao said that AMEC has been determined to become an international semiconductor equipment company since its establishment. At present, the expansion of overseas markets has achieved certain results, and in the future, it will continue to promote the degree of internationalization through multiple measures.