Huazhong University of Science and Technology and Shanghai Institute of Optics and Fine Mechanics jointly held a research project seminar on EUV lithography light source research
Tang Ming, deputy dean of the School of Optics and Electronic Information of Huazhong University of Science and Technology, Zhang Jinwei, assistant to the dean, and six other tutor representatives recently went to Shanghai to jointly hold a research project seminar and joint training cooperation exchange meeting with the Shanghai Institute of Optics and Fine Mechanics of the Chinese Academy of Sciences. Leng Yuxin, deputy director of the Shanghai Institute of Optics and Fine Mechanics, as well as tutor representatives from both sides and 15 joint training students attended the meeting. The meeting was chaired by Jin Lihui, deputy director of the Graduate School of the Shanghai Institute of Optics and Fine Mechanics.
In the scientific research exchange session, Lin Nan, deputy director of the National Key Laboratory of Ultra-Strong Laser Science and Technology of Shanghai Institute of Optics and Fine Mechanics, gave a report entitled "Research Progress of Extreme Ultraviolet Lithography Light Source"; Li Sikun, Party Secretary of the Information Optics and Optoelectronic Technology Laboratory, gave a report entitled "Simulation and Detection Technology for Lithography Applications"; Shi Zhiyong, engineer of the National Key Laboratory of Ultra-Strong Laser Science and Technology, gave a report entitled "Research Progress of Theoretical Simulation of LPP-EUV Lithography Light Source"; Professor Li Zhengyan of the School of Optoelectronics gave a report entitled "Laser Plasma Diagnosis and Droplet Tin Target"; Professor Zhu Guangzhi gave a report entitled "High-Power and High-Energy Solid Picosecond Ultrafast Laser"; Associate Professor Li Bo gave a report entitled "Key Technologies of High-Power Pulsed CO2 Lasers". The teachers present actively discussed their respective scientific research fields and cutting-edge progress, sparked innovative wisdom from the exchanges, and found opportunities for win-win cooperation from the exploration.
In the subsequent HUST joint training teacher-student exchange session, Mr. Tang Ming, on behalf of the college leaders and teachers, greeted the students and encouraged them to make good use of the educational and scientific research resources of both sides, seize opportunities, improve their abilities, and take on responsibilities in the Shanghai Institute of Optics and Fine Mechanics. The joint training students said that the topics during the joint training were closely centered on major national projects and needs, and they deeply felt the strong scientific research atmosphere in the institute, and carried out experimental research on the high-tech scientific research platform. They will cherish the opportunity and work hard to achieve good results.
