Leibo Microelectronics’ first domestic flat-panel display mask coating machine leaves the factory
Recently, the first domestic flat-panel display mask coating machine developed and produced by Jiangsu Leibo Microelectronics Equipment Co., Ltd. has officially left the factory. This is a major breakthrough for Leibo Microelectronics in the field of flat-panel display mask coating machines, marking Leibo Microelectronics' technical strength in this field has been significantly improved, injecting strong impetus into the domestic semiconductor equipment industry.
Flat panel display mask coating machine
The mask coater is a key equipment in flat panel display manufacturing. Its function is to accurately coat the mask during the production process of flat panel display devices to ensure the imaging quality and performance of the display. This equipment The degree of precision is directly related to the quality of the final product.
For a long time, the core equipment of the flat panel display industry has relied on imports, which not only increases costs but also restricts the development speed of the domestic industry. The successful research and development of Leibo Microelectronics’ first domestic flat-panel display mask coating machine has laid a solid foundation for the independent innovation and industrial upgrading of my country’s flat-panel display industry.
Features
1. The equipment is compatible with mask plates with specifications ranging from 202448 to 851410, and can be applied to a variety of sizes;
2. It adopts a dust-free design and an independent controllable air duct design, and the cleanliness is better than level 10;
3. The glue coating cavity adopts 12K mirror panel, which is easy to disassemble and easy to clean and maintain;
4. The whole machine is equipped with safety detection sensors such as vibration frequency, noise, acceleration, laser ranging, etc. to improve safety performance;
5. The machine has video monitoring and logging functions, and alarm records can be traced;
6. Fully automatic film transfer, high-precision servo centering, and automatic formula operation to avoid human intervention and improve product yield;
7. The equipment can optionally be equipped with an extended vertical flipping feeding mechanism, cleaning unit, glue baking unit, UV cleaning unit, and slitcoat.
Product parameters
1. The applicable substrate diagonal size is 400mm~1650mm, and the thickness is 0.5mm~16mm;
2. Speed range: ±1000rpm, maximum acceleration: 200rpm/s, speed accuracy: ±0.5rpm;
3. Photoresist: 1 channel (optional 3 channels), cleaning solution: 1 channel;
4. Photoresist filter precision: 0.1μm;
5. Equipment vibration intensity ≤0.5mm/s;
6. Glue thickness range: 200nm~5000nm, glue thickness non-uniformity ≤±2%;
7. Photoresist supply: high-precision glue pump.