I mean, it has already started with Omnivision.Here it is. The cabbagization of imaging sensors.
2022 news but NikkeiAsia reposted it with new date in 2024.. LOOL
TAIPEI -- Huawei Technologies is building a massive semiconductor equipment research and development center in Shanghai as the Chinese tech titan continues to beef up its chip supply chain to counter a U.S. crackdown.
The center's mission includes building lithography machines, vital equipment for producing cutting-edge chips. Washington's export controls have sharply reduced Huawei's access to this equipment, whose production is dominated by just three companies: ASML of the Netherlands and Japan's Nikon and Canon.
To staff the new center, Huawei is offering salary packages worth up to twice as much as local chipmakers, industry executives and sources briefed on the matter told Nikkei Asia. The company has already hired numerous engineers who have worked with top global chip tool builders like Applied Materials, Lam Research, KLA and ASML, they said, adding that chip industry veterans with more than 15 years of experience at leading chipmakers like TSMC, Intel and Micron are also among recent and potential hires.
Total investment for the the entire R&D base will come to about 12 billion yuan ($1.66 billion), according to the Shanghai government, which listed it as one of the city's top projects for 2024.
The campus covers about 224 football fields in area and is almost twice as big as the company's renowned Ox Horn Campus, a European village-style site in the Chinese city of Dongguan. Like Ox Horn, the Shanghai campus will include trains for commuting between buildings in the campus. When completed, it will be able to accommodate more than 35,000 high-tech workers, according to the People's Government of Qingpu District of Shanghai Municipality.
In this paper, we first present a brief review of the advanced-node logic device technology development and its key bottleneck/component processes using the existing lithographic capabilities. It is shown to be feasible to evolve into the GAA era with the minimum change of current FinFET process and a minor refining of previously reported Forksheet structure. The concept of hybrid-channel devices is raised which is not only promising for 3D vertical integration, but also offers an optimal tradeoff between device performance and power/leakage. To address the fabrication challenges, a mandrel/spacer engineering based patterning and metallization technology is proposed and its process development results are reported. This patterning & metallization technique can be applied to fabricate advanced logic and SRAM circuits with significantly enhanced pattern density. It is based on the self-aligned multiple patterning (SAMP) wherein either an alternating arrangement of different materials (with high etching selectivity) or multi-color layer decomposition (i.e., splitting of metallization process) is utilized to solve the edge-placement-error (EPE) issue. In particular, we explore various schemes of self-aligned triple patterning (SATP) to identify the potential solution to ensure a satisfactory profile control of the consecutively formed spacers. Moreover, this technique can incorporate rigorously self-aligned vias & cuts (SAVC), and accommodate a metal-layer division (MLD) to split the neighboring metal lines into two vertically staggered layers with their coupling capacitance significantly reduced. The tested metal Ru allows a direct dry etching, which offers a metal recess capability to enable an alternating-material coverage of neighboring metal wires by two different hard masks such that a selective etching can be applied to form rigorously self-aligned vias. Our early-stage process development is focused on SATP process optimization, fabrication of two simplified grating structures, material screening for appropriate etching selectivity, and metal-layer-division realization. Potential processing challenges such as Ru trench-filling quality and scaling issues of SAVC technology for advanced IC manufacturing will also be discussed. |