Semiconductor wafers are important raw materials for manufacturing chips. In the chip lithography process, the surface of the semiconductor wafer is often required to be extremely smooth and flat. However, how to make semiconductors have a mirror-smooth surface has always been one of the key core technologies that restricts the development of my country's chip industry.
Recently, an ultra-precision polishing team from Suzhou University introduced electric fields into the traditional chemical mechanical polishing (CMP) process and developed the first electrochemical mechanical polishing (ECMP) equipment at home and abroad, achieving damage-free, high-precision, and high-efficiency semiconductor polishing. Craftsmanship. Through processing experiments on third-generation semiconductor materials, the surface roughness of semiconductor materials can be reduced to less than 0.22nm, reaching nanoscale processing standards. The efficiency of polishing processing can be increased to 5 times that of existing CMP technology, improving the efficiency of chip companies. Production efficiency is 130%-160%. At the same time, this process can effectively increase the abrasive utilization rate by 32% and significantly reduce the cost of polishing fluid by more than 70%.