Canon abandoned its DUVL manufacturing business and chose to go with nanoimprint Lithography.I recently heard of nanoimprint lithography, which Canon has developed the equipment for, and which does not utilize projection lenses to make imprints of circuit patterns of a reticle unto photoresists resin layered unto semiconductor wafers, but instead "perfectly" positions the photoresist resin atop a wafer using inkjet technology and then also "perfectly" places and presses the reticle atop the photoresist and then upon the incidence of DUV light sources through the transparent portions of the reticle that impact the photoresists, circuit patterns capable of matching what can be achieved by ASML' s EUV machines (>10 nm) can be achieved.
Has China attempted any research and development into nanoimprint lithography? Does Canon have a good chance of commercially marketing its technology?
Canon claims it will eventually be as good as DUVL and even EUVL with a much reduced cost in terms of equipment.
They have alot of experience with making Printers using Inkjet technology.
So this is something that they can apply inkjet tech to.
They are supplying their equipment to a new FAB being built in Japan. We will have to see how this works out.
There are i believe 2 companies in China developing nanoimprint Lithography.
So China is also pursuing this technology.