We already talked about this. Maskless equipment is really slow versus optical lithography. It is like the difference between copying with a pen and photocopying a document. Some techniques use "multiple pens" so to speak to make it faster but it is still really slow. It is mainly used to create masks to be used in lithography. Other than that at best it could be used to make a singular chip prototype at a really slow rate.
Chinese semiconductor industry
- Thread starter Hendrik_2000
- Start date
- Status
It doesnt look like its for high volume IC production.
Skywatcher
Captain
Japan (Nikon to be precise) missed the boat on immersion DUVL, which gave ASML a lead among potential EUVL customers (after all, EUVL users would still require DUVL to produce the less advanced features on 7nm processes, for reasons of cost and time).
And IIRC, Nikon also insisted on doing as much of the EUVL R&D in house as it possibly could (and then some), with the attendant schedule and cost overrun.
In the end, Nikon ended up with a EUVL program that was behind ASML in schedule, with a much more uncertain sales market, and mounting bills (Nikon hadn't exactly been the poster child for financial health after 2005).
And they are the first to be fired in a massive downsizing.
Hendrik_2000
Lieutenant General
Via vincent lowly they complete the supply chain for semiconductor manufacturing one block at a time
Electron beam silicon wafer defect inspection equipment for sub 10nm semiconductors from 东方晶源微电子科技（北京）有限公司 received an award
时间：2021年01月29日 14:24 来源：亦城时报
近日，记者从区内企业东方晶源微电子科技 (北京) 有限公司（以下简称东方晶源）获悉，在硬科技领域的王牌赛事中，其有关电子束方面的项目在近千个参赛项目中脱颖而出，摘得2020年前沿科技创新大赛“总决赛季军”及“集成电路领域TOP10”两项大奖 。
此次东方晶源获奖项目为“基于多电子束的10纳米以下集成电路制程缺陷检测设备研发与产业化”，该获奖项目锁定了东方晶源未来产品研发的关键方向。东方晶源在集成电路良率管理领域的突破，是国内集成电路产业链供应链自主可控的关键一步。
“电子束缺陷检测设备，是国产微电子领域短板中的短板。”东方晶源有关负责人表示，芯片制造进入20纳米及以下节点后，关键制程的尺寸测量和缺陷检测的精确性和有效性将对产品良率产生决定性作用。纳米级电子束检测设备主要利用扫描电镜的原理实现纳米级成像并基于成像进行测量和分析。该设备主要应用在芯片制造关键制程，属于芯片制造过程中良率检测和控制的必需环节，此类设备和技术是我国集成电路行业 “卡脖子”技术之一，而电子束图形缺陷检测设备的诞生则填补了此项技术的国内空白。据了解，东方晶源电子束晶圆缺陷检测设备应用电子束扫描技术对硅片表面进行高分辨率成像，通过智能算法检测制造过程中的物理和电性缺陷，为集成电路的开发与量产提供了高精度的检测和良率解决方案。
北京经开区是高新技术产业前沿阵地，高度重视发展集成电路产业，已逐步成为全国集成电路产业聚集度最高、技术水平最先进的区域。在经开区的谋划布局及大力引聚下，华卓精科、燕东8英寸、耐威科技8英寸MEMS芯片、中电科、东方晶源、科益宏源等企业纷纷落户，目前已经形成了以中芯国际、北方华创为龙头，包括制造、封装测试、装备、零部件及材料、设计等愈加完备的集成电路产业链。
作为三项国家科技02重大专项（极大规模集成电路制造技术及成套工艺项目）及工信部工业强基专项的承接单位，东方晶源的技术创新水平近年突飞猛进，不断突破多项卡脖子技术，研发出多项国内领先技术。其中，在硬件产品方面，东方晶源电子束晶圆缺陷检测设备EBI已实现在客户端主流制程的验证并取得重大突破；关键尺寸量测装备CD-SEM也已完成设计和开发，性能接近国际主流产品水平；在软件产品方面，东方晶源计算光刻产品OPC目前已经通过25纳米存储器芯片工厂量产验证，逻辑芯片产线验证也正在紧锣密鼓进行中。
google trans
Time: 14:24 January 29, 2021 Source: Yicheng Times Recently, the reporter learned from the regional company Oriental Jingyuan Microelectronics Technology (Beijing) Co., Ltd. (hereinafter referred to as Oriental Jingyuan) that in the trump card competition in the hard technology field, its electron beam projects are among nearly a thousand entries. Stand out and won two awards in the 2020 Frontier Science and Technology Innovation Competition, the "Second Runner-up" and "Top 10 in the Field of Integrated Circuits".
The award-winning project of Dongfang Jingyuan is "R&D and industrialization of defect detection equipment for integrated circuit processes below 10 nanometers based on multi-electron beams". This award-winning project has locked the key direction of Dongfang Jingyuan's future product research and development. The breakthrough of Epistar in the field of integrated circuit yield management is a key step in the independent and controllable domestic integrated circuit industry chain supply chain.
"Electron beam defect detection equipment is a shortcoming in the shortcomings of domestic microelectronics." The relevant person in charge of Dongfang Jingyuan said that after chip manufacturing enters the node of 20 nanometers and below, the accuracy and precision of the size measurement and defect detection of the key process Effectiveness will have a decisive effect on product yield. Nano-level electron beam detection equipment mainly uses the principle of scanning electron microscope to realize nano-level imaging and perform measurement and analysis based on imaging.
This equipment is mainly used in the key process of chip manufacturing, which is a necessary part of yield detection and control in the chip manufacturing process. This type of equipment and technology is one of the "neck" technologies in my country's integrated circuit industry, and the electron beam pattern defect detection equipment The birth fills the domestic blank of this technology.
It is understood that the Dongfang Jingyuan electron beam wafer defect inspection equipment uses electron beam scanning technology to perform high-resolution imaging on the surface of the silicon wafer, and uses intelligent algorithms to detect physical and electrical defects in the manufacturing process, which is for the development and mass production of integrated circuits. Provides high-precision detection and yield solutions. Beijing Economic and Technological Development Zone is the frontier of the high-tech industry. It attaches great importance to the development of the integrated circuit industry and has gradually become the region with the highest concentration of integrated circuit industry and the most advanced technology in the country.
Under the planning and layout of the economic development zone and vigorously attracting them, Huazhuo Jingke, Yandong 8-inch, Naiwei Technology 8-inch MEMS chip, CLP, Dongfang Jingyuan, Keyi Hongyuan and other enterprises have settled down one after another. It has formed an increasingly complete integrated circuit industry chain with SMIC and Northern China as the leader, including manufacturing, packaging and testing, equipment, parts and materials, and design. As the undertaking unit of three major national science and technology 02 major projects (very large-scale integrated circuit manufacturing technology and complete process projects) and the Ministry of Industry and Information Technology, the technological innovation level of Oriental Epistar has advanced by leaps and bounds in recent years, continuously breaking through a number of card neck technologies, research and development Produce a number of domestic leading technologies. Among them, in terms of hardware products, EBI, the EBI electron beam wafer defect inspection equipment of Dongfang Jingyuan, has achieved the verification of the mainstream process of the client and has made a major breakthrough; the key dimension measurement equipment CD-SEM has also been designed and developed, and its performance is close to international Mainstream product level; in terms of software products, the OPC of Dongfang Jingyuan's computing lithography product has passed the verification of the mass production of the 25nm memory chip factory, and the verification of the logic chip production line is also in full swing.
Electron beam silicon wafer defect inspection equipment for sub 10nm semiconductors from 东方晶源微电子科技（北京）有限公司 received an award
时间：2021年01月29日 14:24 来源：亦城时报
近日，记者从区内企业东方晶源微电子科技 (北京) 有限公司（以下简称东方晶源）获悉，在硬科技领域的王牌赛事中，其有关电子束方面的项目在近千个参赛项目中脱颖而出，摘得2020年前沿科技创新大赛“总决赛季军”及“集成电路领域TOP10”两项大奖 。
此次东方晶源获奖项目为“基于多电子束的10纳米以下集成电路制程缺陷检测设备研发与产业化”，该获奖项目锁定了东方晶源未来产品研发的关键方向。东方晶源在集成电路良率管理领域的突破，是国内集成电路产业链供应链自主可控的关键一步。
“电子束缺陷检测设备，是国产微电子领域短板中的短板。”东方晶源有关负责人表示，芯片制造进入20纳米及以下节点后，关键制程的尺寸测量和缺陷检测的精确性和有效性将对产品良率产生决定性作用。纳米级电子束检测设备主要利用扫描电镜的原理实现纳米级成像并基于成像进行测量和分析。该设备主要应用在芯片制造关键制程，属于芯片制造过程中良率检测和控制的必需环节，此类设备和技术是我国集成电路行业 “卡脖子”技术之一，而电子束图形缺陷检测设备的诞生则填补了此项技术的国内空白。据了解，东方晶源电子束晶圆缺陷检测设备应用电子束扫描技术对硅片表面进行高分辨率成像，通过智能算法检测制造过程中的物理和电性缺陷，为集成电路的开发与量产提供了高精度的检测和良率解决方案。
北京经开区是高新技术产业前沿阵地，高度重视发展集成电路产业，已逐步成为全国集成电路产业聚集度最高、技术水平最先进的区域。在经开区的谋划布局及大力引聚下，华卓精科、燕东8英寸、耐威科技8英寸MEMS芯片、中电科、东方晶源、科益宏源等企业纷纷落户，目前已经形成了以中芯国际、北方华创为龙头，包括制造、封装测试、装备、零部件及材料、设计等愈加完备的集成电路产业链。
作为三项国家科技02重大专项（极大规模集成电路制造技术及成套工艺项目）及工信部工业强基专项的承接单位，东方晶源的技术创新水平近年突飞猛进，不断突破多项卡脖子技术，研发出多项国内领先技术。其中，在硬件产品方面，东方晶源电子束晶圆缺陷检测设备EBI已实现在客户端主流制程的验证并取得重大突破；关键尺寸量测装备CD-SEM也已完成设计和开发，性能接近国际主流产品水平；在软件产品方面，东方晶源计算光刻产品OPC目前已经通过25纳米存储器芯片工厂量产验证，逻辑芯片产线验证也正在紧锣密鼓进行中。
google trans
Time: 14:24 January 29, 2021 Source: Yicheng Times Recently, the reporter learned from the regional company Oriental Jingyuan Microelectronics Technology (Beijing) Co., Ltd. (hereinafter referred to as Oriental Jingyuan) that in the trump card competition in the hard technology field, its electron beam projects are among nearly a thousand entries. Stand out and won two awards in the 2020 Frontier Science and Technology Innovation Competition, the "Second Runner-up" and "Top 10 in the Field of Integrated Circuits".
The award-winning project of Dongfang Jingyuan is "R&D and industrialization of defect detection equipment for integrated circuit processes below 10 nanometers based on multi-electron beams". This award-winning project has locked the key direction of Dongfang Jingyuan's future product research and development. The breakthrough of Epistar in the field of integrated circuit yield management is a key step in the independent and controllable domestic integrated circuit industry chain supply chain.
"Electron beam defect detection equipment is a shortcoming in the shortcomings of domestic microelectronics." The relevant person in charge of Dongfang Jingyuan said that after chip manufacturing enters the node of 20 nanometers and below, the accuracy and precision of the size measurement and defect detection of the key process Effectiveness will have a decisive effect on product yield. Nano-level electron beam detection equipment mainly uses the principle of scanning electron microscope to realize nano-level imaging and perform measurement and analysis based on imaging.
This equipment is mainly used in the key process of chip manufacturing, which is a necessary part of yield detection and control in the chip manufacturing process. This type of equipment and technology is one of the "neck" technologies in my country's integrated circuit industry, and the electron beam pattern defect detection equipment The birth fills the domestic blank of this technology.
It is understood that the Dongfang Jingyuan electron beam wafer defect inspection equipment uses electron beam scanning technology to perform high-resolution imaging on the surface of the silicon wafer, and uses intelligent algorithms to detect physical and electrical defects in the manufacturing process, which is for the development and mass production of integrated circuits. Provides high-precision detection and yield solutions. Beijing Economic and Technological Development Zone is the frontier of the high-tech industry. It attaches great importance to the development of the integrated circuit industry and has gradually become the region with the highest concentration of integrated circuit industry and the most advanced technology in the country.
Under the planning and layout of the economic development zone and vigorously attracting them, Huazhuo Jingke, Yandong 8-inch, Naiwei Technology 8-inch MEMS chip, CLP, Dongfang Jingyuan, Keyi Hongyuan and other enterprises have settled down one after another. It has formed an increasingly complete integrated circuit industry chain with SMIC and Northern China as the leader, including manufacturing, packaging and testing, equipment, parts and materials, and design. As the undertaking unit of three major national science and technology 02 major projects (very large-scale integrated circuit manufacturing technology and complete process projects) and the Ministry of Industry and Information Technology, the technological innovation level of Oriental Epistar has advanced by leaps and bounds in recent years, continuously breaking through a number of card neck technologies, research and development Produce a number of domestic leading technologies. Among them, in terms of hardware products, EBI, the EBI electron beam wafer defect inspection equipment of Dongfang Jingyuan, has achieved the verification of the mainstream process of the client and has made a major breakthrough; the key dimension measurement equipment CD-SEM has also been designed and developed, and its performance is close to international Mainstream product level; in terms of software products, the OPC of Dongfang Jingyuan's computing lithography product has passed the verification of the mass production of the 25nm memory chip factory, and the verification of the logic chip production line is also in full swing.
Hendrik_2000
Lieutenant General
Again via vincent
The company from the previous post is building a plant for its products
时间：2021年02月10日 13:42 来源：亦城时报
北京经开区日前集中签约129个“两区”建设项目，东方晶源微电子科技（北京）有限公司（简称东方晶源）集成电路检测装备研发生产基地项目作为承担国家重要战略、填补国内空白、解决关键技术难题的产业项目之一，正式签约落地北京经开区。
东方晶源基地项目占地面积约为45亩，拟开发应用于集成电路制造业的电子束检测／量测设备，建立满足研发和量产需求的研发生产基地，以电子束硅片缺陷检测设备、电子束关键尺寸量测设备、电子束硅片缺陷复检设备为主要产品。
东方晶源自落户北京经开区，突破多项“卡脖子”技术，其中自主研发的电子束图形缺陷检测设备更是补上了国产微电子领域短板中的短板，填补了集成电路行业“卡脖子”技术的国内空白。
“经过在北京经开区6年的研发和培育，东方晶源目前已经进入到了扩大产能的阶段，所以签约进入北京经开区产业基地是一件水到渠成的事情，借助北京经开区集成电路领域上下游企业聚集的产业优势，我们可以在这块土地上逐渐强大。”据东方晶源董事长俞宗强介绍，该项目预计今年第一季度启动，除了研发电子束相关设备外，还将开发一套面向高端芯片制造的综合良率提升系统，突破我国该领域的“卡脖子”问题，“为北京市和北京经开区的科技创新、经济发展、人才引进和产业环境建设贡献力量，填补技术空白、实现技术创新”。
一直以来，北京经开区紧抓集成电路产业发展，现已形成以中芯国际、北方华创为龙头，包括设计、晶圆制造、封装测试、装备、零部件及材料等完备的集成电路产业链；在此次签约的项目中，集成电路项目占据总签约数的一半以上。“十四五”期间，北京经开区将成为北京落实国家集成电路战略等重大产业创新攻关项目的重要策源地和主要载体。
此次东方晶源基地项目的落地，将和众多集成电路项目一起，助力北京经开区成为中国集成电路产业创新发展的核心区与承载地。
Google trans
"After 6 years of research and development and cultivation in the Beijing Economic Development Zone, Dongfang Jingyuan has now entered the stage of expanding its production capacity. Therefore, signing a contract to enter the industrial base of the Beijing Economic Development Zone is a matter of course, with the help of the integrated circuit field of the Beijing Economic Development Zone. The industrial advantage of upstream and downstream enterprises gathering, we can gradually become stronger on this land." According to Yu Zongqiang, Chairman of Oriental Jingyuan, the project is expected to start in the first quarter of this year.
In addition to the development of electron beam related equipment, a set of equipment will be developed. The comprehensive yield improvement system for high-end chip manufacturing breaks through the "stuck neck" problem in this field in China, and "contributes to the technological innovation, economic development, talent introduction and industrial environment construction of Beijing and Beijing Economic Development Zone, and fills the technological gap. , Realize technological innovation". For a long time, Beijing Economic and Technological Development Zone has been closely focusing on the development of the integrated circuit industry, and has now formed a complete integrated circuit industry with SMIC and Northern China as the leader, including design, wafer manufacturing, packaging and testing, equipment, parts and materials, etc. Chain; Among the projects signed this time, integrated circuit projects accounted for more than half of the total number of contracts. During the "14th Five-Year Plan" period, the Beijing Economic and Technological Development Zone will
The company from the previous post is building a plant for its products
时间：2021年02月10日 13:42 来源：亦城时报
北京经开区日前集中签约129个“两区”建设项目，东方晶源微电子科技（北京）有限公司（简称东方晶源）集成电路检测装备研发生产基地项目作为承担国家重要战略、填补国内空白、解决关键技术难题的产业项目之一，正式签约落地北京经开区。
东方晶源基地项目占地面积约为45亩，拟开发应用于集成电路制造业的电子束检测／量测设备，建立满足研发和量产需求的研发生产基地，以电子束硅片缺陷检测设备、电子束关键尺寸量测设备、电子束硅片缺陷复检设备为主要产品。
东方晶源自落户北京经开区，突破多项“卡脖子”技术，其中自主研发的电子束图形缺陷检测设备更是补上了国产微电子领域短板中的短板，填补了集成电路行业“卡脖子”技术的国内空白。
“经过在北京经开区6年的研发和培育，东方晶源目前已经进入到了扩大产能的阶段，所以签约进入北京经开区产业基地是一件水到渠成的事情，借助北京经开区集成电路领域上下游企业聚集的产业优势，我们可以在这块土地上逐渐强大。”据东方晶源董事长俞宗强介绍，该项目预计今年第一季度启动，除了研发电子束相关设备外，还将开发一套面向高端芯片制造的综合良率提升系统，突破我国该领域的“卡脖子”问题，“为北京市和北京经开区的科技创新、经济发展、人才引进和产业环境建设贡献力量，填补技术空白、实现技术创新”。
一直以来，北京经开区紧抓集成电路产业发展，现已形成以中芯国际、北方华创为龙头，包括设计、晶圆制造、封装测试、装备、零部件及材料等完备的集成电路产业链；在此次签约的项目中，集成电路项目占据总签约数的一半以上。“十四五”期间，北京经开区将成为北京落实国家集成电路战略等重大产业创新攻关项目的重要策源地和主要载体。
此次东方晶源基地项目的落地，将和众多集成电路项目一起，助力北京经开区成为中国集成电路产业创新发展的核心区与承载地。
Google trans
"After 6 years of research and development and cultivation in the Beijing Economic Development Zone, Dongfang Jingyuan has now entered the stage of expanding its production capacity. Therefore, signing a contract to enter the industrial base of the Beijing Economic Development Zone is a matter of course, with the help of the integrated circuit field of the Beijing Economic Development Zone. The industrial advantage of upstream and downstream enterprises gathering, we can gradually become stronger on this land." According to Yu Zongqiang, Chairman of Oriental Jingyuan, the project is expected to start in the first quarter of this year.
In addition to the development of electron beam related equipment, a set of equipment will be developed. The comprehensive yield improvement system for high-end chip manufacturing breaks through the "stuck neck" problem in this field in China, and "contributes to the technological innovation, economic development, talent introduction and industrial environment construction of Beijing and Beijing Economic Development Zone, and fills the technological gap. , Realize technological innovation". For a long time, Beijing Economic and Technological Development Zone has been closely focusing on the development of the integrated circuit industry, and has now formed a complete integrated circuit industry with SMIC and Northern China as the leader, including design, wafer manufacturing, packaging and testing, equipment, parts and materials, etc. Chain; Among the projects signed this time, integrated circuit projects accounted for more than half of the total number of contracts. During the "14th Five-Year Plan" period, the Beijing Economic and Technological Development Zone will
Hendrik_2000
Lieutenant General
Like they say necessity is the mother of invention paradoxically because of tech restriction Huawei branch into all sort of technology application and come out stronger in due time. Banning is not going to kill Huawei but spread out the technology to wider area, and empowering Chinese economy with the latest technology and improve efficiency and competitiveness
I saw this video from that Barrett channel on Youtube, by that fine pair of English gentlemen, and they were at the Mobile World Congress Shanghai 2021 recently.
They attended several of the key note speakers speeches, and they only made one main comment, and that was how everyone talked about sustainability, which I guess means the Green stuff, hippie ideas, and all that. Less waste, better use of resources, combat climate change, more efficiency, that is what they were talking about I would believe. They are good ideas.
Here in this article, the fishing farming, plays right into it. But, the article writer may not have realized that. Why the writer did not realize that, due to having no exposure to 5G! That is what happens when you fall behind by that much. Everything passes you by, including the ideas. If you have a more efficient process of production, whether fish farming, pig farming, mining, or running an electrical bus fleet, the 5G from Huawei etc. will help the entity become more efficient, help out the environment, and promote the sustainability ideals.
When the United States government reads that article, it will warm their hearts that Huawei is selling less phones, but instead they are now forced into applying 5G technology across all types of industries in China. Then next, Huawei will have no choice but to be forced to sell this new 5G software technology globally (and associated licensing fees). The United States government will give itself a pat on the back, when they realized that Huawei was seen going in another direction in its corporate businesses, such as pig farming and fishing farming, instead of more high tech phone production. High five!
- Status