during the reporting period of 2017 , 2018 and 2019.. article clearly mentioned.
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Uprecision of Arfi has successfully developed too
Uprecision's double stage component is at the same level as ASML's most advanced double stage component (products above 2000 series) in a large generation.
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Question: Dr. Zhu Yu, is there any gap between the workpiece table developed by your research group and ASML company, or what gaps still exist?
Answer: At present, the workpiece table developed by our research group is at the same level as the most advanced workpiece table (products above 2000 series) of ASML company in a large generation. However, there is still a generation gap with ASML's 2000 series and above products in a small generation, and it can catch up with the international advanced level after one more iteration.
Zhu Yu led a major scientific and technological research team of more than 100 people. Facing the major technical needs of IC manufacturing equipment, focusing on the generation of nano-level motion precision, he carried out systematic, In-depth basic theory and key technology research. Presided over major national science and technology special projects and national basic scientific research projects, developed ultra-precision workpiece table systems, large-stroke air-flotation/maglev planar motors, six-degree-of-freedom nano-precision micro-motion tables and other core components of semiconductor manufacturing equipment, and mastered IC manufacturing The equipment includes a series of key technologies with independent intellectual property rights such as ultra-precision mechanical design and manufacturing, ultra-precision laser interferometry and calibration, nano-precision high-dynamic motion control, high-performance active/passive vibration isolation, etc.In October 2020, two companies co-founded by Dr. Zhu Yu, a tenured professor of the Department of Mechanical Engineering of Tsinghua University, are applying for IPOs on the Science and Technology Innovation Board: one is Beijing Huazhuo Jingke Technology Co., Ltd. (referred to as "Huazhuo Jingke"), and another Huahai Qingke Co., Ltd. ("Huahai Qingke") co-founded by him and owned by Tsinghua University.
Professor Zhu Yu is the founder of Uprecision and Hwatsing
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