uprecision so far only delivered stations for Arf dry，Arfi station is still in research stage. The machine they delivered to SMEE is 65nm
www.sinodefenceforum.com
Look at this one. Their new report covers business activity up until 2023 Jun
i have read this entire report .. with respect. you have very bad habit to post outdated information. i have noticed many times. first on engine thread.
entire PDF report have content upto 2020-2021. they have also added business report of first two quarters of 2023. not a big deal as Majority of the content is the same as the original document..
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we have official reports ..
Uprecision's double stage component is at the same level as ASML's most advanced double stage component (products above 2000 series) in a large generation.
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Question： Dr. Zhu Yu, is there any gap between the workpiece table developed by your research group and ASML company, or what gaps still exist?
Answer： At present, the workpiece table developed by our research group is at the same level as the most advanced workpiece table (products above 2000 series) of ASML company in a large generation. However, there is still a generation gap with ASML's 2000 series and above products in a small generation, and it can catch up with the international advanced level after one more iteration.
Zhu Yu led a major scientific and technological research team of more than 100 people. Facing the major technical needs of IC manufacturing equipment, focusing on the generation of nano-level motion precision, he carried out systematic, In-depth basic theory and key technology research. Presided over major national science and technology special projects and national basic scientific research projects, developed ultra-precision workpiece table systems, large-stroke air-flotation/maglev planar motors, six-degree-of-freedom nano-precision micro-motion tables and other core components of semiconductor manufacturing equipment, and mastered IC manufacturing The equipment includes a series of key technologies with independent intellectual property rights such as ultra-precision mechanical design and manufacturing, ultra-precision laser interferometry and calibration, nano-precision high-dynamic motion control, high-performance active/passive vibration isolation, etc.In October 2020, two companies co-founded by Dr. Zhu Yu, a tenured professor of the Department of Mechanical Engineering of Tsinghua University, are applying for IPOs on the Science and Technology Innovation Board: one is Beijing Huazhuo Jingke Technology Co., Ltd. (referred to as "Huazhuo Jingke"), and another Huahai Qingke Co., Ltd. ("Huahai Qingke") co-founded by him and owned by Tsinghua University.
Professor Zhu Yu is the founder of Uprecision and Hwatsing
