LA200 UV-LED exposure machine was successfully launched, Shanghai Tushuang achieved breakthrough.
After continuous scientific research and technological innovation, Shanghai Lieth Precision Equipment Co., Ltd. (Shanghai Lieth Precision Equipment Co., LTD) recently successfully launched the LA200 exposure machine. This is Shanghai Lieth Precision Equipment Co., Ltd. based on its own R&D strength and breaking through key technical barriers. Phased results have been achieved in the research, development, production and integration services of semiconductor lithography-specific process equipment.
The LA200 exposure machine uses UV-LED as the exposure light source, which can achieve i-line, h-line or i&h mixed exposure wavelengths. It also has manual alignment and automatic alignment modes, and is equipped with a high-quality imaging system and a sophisticated motion control unit. and intelligent image processing algorithms to meet customers’ needs for high-precision alignment. This model is equipped with front alignment, back alignment systems, and infrared alignment systems, and has a wide range of process adaptability. Compared with mercury lamp lighting equipment, LA200 has lower power consumption, strong maintainability and low maintenance costs; it has Proximity, contact (soft contact, hard contact) and other exposure modes are suitable for MEMS, LED, power devices, compound semiconductors, wafer packaging and other industries.
Focusing on the rapid development of the domestic semiconductor industry and the strong demand of the end market, Shanghai Tushuang will continue to uphold the corporate culture of "honesty and trustworthiness, rigorous dedication, efficient innovation", open cooperation and industry integration, and provide better services for China's semiconductor and pan-semiconductor industries. There are many "picture dual solutions"!