Chinese semiconductor industry

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tokenanalyst

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SiC-based EUV and DUV photodetector!
These companies are just the tip of the iceberg. The entire supply chain for DUV/EUV must be huge, but we won’t be able to see it until 2025 or afterwards.
Yeah interesting, the company Gano Opto and they launched these EUV photosensors last year.

GaNo Opto launches first silicon carbide EUV photodiode​

GaNo Optoelectronics Inc – a spin-off from China’s Nanjing University that offers ultraviolet (UV) detectors and modules based on wide-bandgap semiconductors including gallium nitride (GaN) and silicon carbide (SiC) – has formally released what it claims are the first commercial SiC-based extreme ultraviolet (EUV) photodiodes.

Figure 1: Distribution of optical emission spectrum from THz to x-ray.


Figure 1: Distribution of optical emission spectrum from THz to x-ray.

With the rapid development of VLSI fabrication technologies down to 7/5nm nodes (for micro-chips containing billions of transistors), advanced photolithography is transitioning from deep ultraviolet (DUV) immersion lithography based on a 193nm light source to extreme ultraviolet (EUV) lithography based on 13.5nm light source. An EUV lithography system is so complex that demanding technical challenges must be overcome for meeting chipmakers’ requirements for high-volume manufacturing. Among them, the development of high-performance EUV detectors is critical because, to precisely control the photoresist exposure dose, the intensity and uniformity of the EUV light beam must be constantly monitored. Besides EUV lithography, semiconductor EUV detectors are also core components in solar-observing satellites, materials science and many fundamental research fields.

Traditionally, commercial EUV detectors are solely based on silicon (Si), which have been demonstrated with certain success but suffer from several intrinsic drawbacks. For example, although silicon EUV detectors could exhibit moderate quantum efficiency in the EUV wavelength range, they require highly complex optical filters to achieve a high UV/visible rejection ratio as their peak response stays within the visible wavelength range. In addition, silicon detectors are not suitable for working in harsh environments, which would degrade considerably upon high-fluence EUV irradiation.

“It has been well accepted that wide-bandgap semiconductor is the most suitable material for making UV photodetectors,” says chief technology officer Dr Hai Lu, who is also distinguished professor at Nanjing University. “Due to the wide-bandgap nature of SiC, EUV photodiodes based on SiC have no response to background white light and could exhibit very low dark current down to 1pA even at a high temperature of 150℃. This means that the SiC EUV photodiodes have extremely low noise, leading to very high signal-to-noise ratio and detectivity. Meanwhile, it has been confirmed that the radiation hardness of SiC photodiodes is at least 1000 times higher than their silicon counterparts, due to the high electron-hole pair ionization energy and displacement threshold energy of SiC semiconductor,” he adds.

GaNo Opto says that its new intrinsically visible-blind EUV photodiodes can work in either photovoltaic or photoconductive mode with high EUV photon detection efficiency, high response speed and high stability.

Despite the apparent advantages, the implementation of SiC EUV photodiodes is very challenging due to substrate- or epi-related material defects, relatively poorly modeled device operation, and immature device processing technology. “Our process shows that appropriate surface electric field modulation and surface passivation techniques are critical for realizing SiC EUV photodiodes with low leakage current and long-term stability, both of which are necessary for high-end applications in advanced lithography systems or space satellites,” Lu says.

Figure 2: Some of GaNo Opto’s newly released EUV and vacuum UV detectors.


Figure 2: Some of GaNo Opto’s newly released EUV and vacuum UV detectors.

After pilot production and multiple customer verifications beginning from October 2021, GaNo Opto has started to ship SiC EUV photodiodes and components to several major customers worldwide.

“Our next step is to develop EUV imaging arrays based on SiC photodiodes,” says Lu. “In this case, uniformity among each photodiode pixel and scalability would be the main technological barriers. New implantation and dopant activation sequences, and back-end processing techniques, are being developed to achieve this goal.”

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LanceD23

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yes, SMSC has been doing its own maintenance. If that's what you are asking. It's quite amazing that they've been able to keep this capacity going. Keep in mind that AMAT and Lam employees left smsc back in October of 2022, so SMIC has been operating plant without any American assistance for a while.

What does you mean by license its tech out? How do you license your fabbing tech out for something as complex as 7nm process and expect it to be followed correctly without the same staff around? People that suggest this makes it sound like you are licensing out chip designs

Which other Chinese fabs have the same equipments to even do SMIC's 7nm process?
wow, no maintenance and support for all its tools? With the heavy production and all those wear and tear, how long it can sustain?
huawei has huge volume coming.

of yeah, license out would require sending its personnels out to support. kind of like TSMC sent its support group to set up nanjing operation,
 

tonyget

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In November this year, mainland China imported 16 photolithography machines from the Netherlands with a total value of US$762.7 million.

今年11月,中国大陆从荷兰进口的16台光刻机总价值7.627亿美元

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It seems that only 16 are ASML machines,and I suspect that not all of them are 2000i or above model. So what's the rush?
 

tokenanalyst

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Cambrian landing China Mobile business scenario​



Recently, the Cambrian Lulu (MLU) series of cloud smart accelerator cards were officially launched on China Mobile. As of December 2023, China Mobile has completed the migration of 12 provincial companies and more than 70 AI businesses to the Cambrian Epoch Unit (MLU) series of cloud smart accelerator cards. It has been fully verified that the feasibility, ease of use and computing performance of the Cambricon MLU series of cloud smart accelerator cards have reached or exceeded the level of international mainstream products.
China Mobile relies on the cloud-edge collaborative management architecture and intelligent computing power-aware scheduling capabilities to form a multi-center, large-scale AI computing power cluster around hub nodes in the east and west to support the computing needs of complex AI scenarios and empower China Mobile's entire network AI business.

In 2022, several China Mobile provincial companies such as Guangdong Mobile, Jiangsu Mobile and Yunnan Mobile will participate in the migration, adaptation and testing of domestic AI computing power. Each provincial mobile company carried out independent migration based on the relatively mature AI business scenarios of the province based on the computing power migration module of the private cloud platform (including the Cambrian adaptation image), and adapted and migrated the AI business running on the GPU to the Cambrian LLU (MLU) series. The cloud smart accelerator card verifies the feasibility, ease of use, and computing performance of migrating the pilot AI business to Cambrian computing resources.

It has been fully verified by China Mobile's provincial companies: (1) In terms of feasibility, the business latency of the Cambrian Jisiyuan (MLU) series cloud accelerator cards is the same as or ahead of the GPU running latency while ensuring business accuracy, which is in line with business deployment Demand; (2) In terms of ease of use, the business migration from GPU to Siyuan (MLU) is both efficient and high-performance. The migration process based on the framework is simple and efficient. The migration based on the Cambrian inference engine MagicMind can ensure the optimization needs of the business. ; (3) In terms of computing performance, the performance of the Cambricon MLU series cloud accelerator cards meets the business deployment requirements for CV, NLP and other AI scenarios reported by various provinces, and its performance exceeded that of GPUs in the online stress test.

As of December 2023, China Mobile's 12 provincial companies have completed the adaptation and official launch of more than 70 AI algorithms and AI services. The empowered AI services include engineering quality inspection, bright kitchens, smart work orders, Important and commonly used AI services in various provinces such as Grid Tong. The AI networks involved include CV-type YoloV5, MTCNN, MobileNet, NLP-type Bert, Simbert, etc.
 

tokenanalyst

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13.5nm EUV multilayer film plane reflector​

Main series: EUV multilayer film reflector​

Extreme ultraviolet (EUV) band multi-layer film plane reflector; Main applications: synchrotron radiation beam, higher harmonic science, attosecond science, photolithography technology, coherent diffraction imaging (CDI), etc.;

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