"All these patents are, however, specifically for creating an EUV light source, rather than the machine as a whole. "
In 2017 the CIOMP and others, believe or not, tested an EUV lithography machine, tested Vacuum systems, Projection optics, hydrogen Cleaning systems, anti-vibrations systems. Including a LPP EUV light source, maybe is not as powerful as cymer but was an start.
2. Key technologies of extreme ultraviolet lithography
After years of hard work, we have broken through core unit technologies such
as ultra-high-precision aspheric processing and detection, extreme ultraviolet multi-layer film, and projection objective system integration testing that have restricted the development of extreme ultraviolet lithography in our country, and successfully developed a wave aberration better than 0.75 nm RMS . The two-mirror EUV lithography objective lens system built an EUV lithography exposure device, and for the first time in China, the EUV projection lithography 32 nm line width photoresist exposure pattern was obtained. It has established a relatively complete research and development platform for key technologies of exposure optical systems, successfully completed the research content and mission objectives of major national special projects, achieved a leap in EUV optical imaging technology, and significantly improved the core optical technology level of extreme ultraviolet lithography in my country. At the same time, the implementation of the project has formed a stable research team, laying a solid technical and talent foundation for my country to achieve sustainable development in the field of next-generation lithography technology.
6. Key technologies of extreme ultraviolet lithography
We have successfully developed an exposure device based on the principle of extreme ultraviolet lithography. We have obtained the 32nm 1:1 L/S exposure pattern for the first time in China. We have successfully developed a principle prototype of the LPP-EUV light source. The conversion efficiency index is far higher than the target stated in the mission statement.
That was between 2014-2017, like 6 years ago,
wow time pass fast, so it beg the question, how much more they have achieve since?
Apart from that UPrecission already developed an maglev dual workbench stage, which is a requirement for working in a vacuum environment.
If you search back in this thread I and others had posted a lot of patents that go beyond just the light source, for others subsystems and components of a lithography machine.
"Furthermore, the light source requires an array of gases, light collectors and amplifiers, and magnetic field technology in order to work and so far, China has been unsuccessful in the development of any of these components.
How this person know, what is develop or what is not? of course, believe me bro, they don't give any
technical explanation or lead to
technical sources.
It is predicted by specialists that it will take a minimum of two years for China to create these light sources. "
Which lead to this statement because 2 years is not a lot of time,
Personally I think that the real issue that have been plaguing China lithography efforts for years could be the overlay precision technology and that was something that a guy from ASML said.