Guangli Microelectronics releases CMPEXP modeling tool to enrich manufacturing EDA product matrix
Recently, in order to fill the gap in industrialized CMP modeling tools in the domestic integrated circuit market and meet the needs of chip design companies and wafer manufacturing plants, Guangli Microelectronics officially launched the CMP EXPLORER (referred to as "
CMPEXP ") tool to ensure the manufacturability of chips. performance and yield, solving the pain points of the industry. Chemical Mechanical Planarization CMP is a key link in the integrated circuit manufacturing process. It combines chemical reaction and mechanical grinding to achieve a high degree of planarization of the silicon wafer surface.
With the evolution and iteration of integrated circuit manufacturing processes, the size of nano-devices continues to shrink. Coupled with the increasing level of integration and the increasing number of process levels, the surface flatness of chips at each stage of manufacturing seriously affects product yield and performance. Its impact is through The effect of multi-layer superposition and layout features is more prominent, which can be said to be "a slight difference is a thousand miles away".
How to implement simulation, modeling and optimization of CMP steps has always been an important challenge to ensure chip yield.
Even if the design rules are strictly followed during chip design, for some process-sensitive design patterns, defects such as dishing, dielectric corrosion, and metal thickness fluctuations may still form during the CMP stage, resulting in interconnect failures. Line resistance, capacitance fluctuations, and even metal interconnect shorts and opens. As a result, the process window in subsequent manufacturing steps becomes narrower, and any small fluctuations in the process can cause yield problems. Therefore, the role of Design for Manufacturing DFM is more important. Through accurate simulation for the CMP
step and modeling can identify and prevent CMP-related chip design issues in advance.
CMP: Chemical Mechanical Polishing.