SSMB is a type of FEL, so he is saying pretty much what we had been saying here since 2021, weird that is now that people are putting interest to the idea of this type of technology.
SSMB is the more advance and will be probably the one who power future China EUV machines but is not the only project because according the research literature synchrotron-EUV lithography and conventional EUV FEL project is underway.
China May Be Constructing EUV Lithography Machines on a Massive Scale
Under US pressure, China is compelled to aggressively pursue creative solutions like SSMB-EUV. This could be a game changer if China makes it work.
In a remarkable paper titled “
, published in the Chinese journal
Acta Physica Sinica, scientists from Beijing’s Tsinghua University propose a plan to build an accelerator the size of a football field and use it as a light source for a few dozens of EUV machines working simultaneously. The accelerator in question is a circular ring-shaped device where charged particles, such as electrons or protons, are accelerated to high speeds and kept in a stable orbit using magnetic fields. The particles circulate within the ring repeatedly, allowing them to undergo multiple interactions and experiments. In such particle accelerators, electrons are typically arranged close together in a controlled manner, forming bunches to optimize their behavior and interactions. It’s called electron bunching.
The SSMB (Steady-State Micro-Bunching) EUV light source offers several advantages:
- Firstly, it provides high average power, thanks to the capability of the SSMB storage ring to accommodate multiple EUV beamlines. This allows for enhanced productivity and throughput in lithography processes.
- Secondly, the emitted radiation from the SSMB-EUV light source has a narrow bandwidth and high collimation. This means that the range of wavelengths is tightly controlled, resulting in highly focused and precise radiation. This characteristic is crucial for achieving high-resolution imaging and intricate patterning in lithography applications.
- Furthermore, the SSMB-EUV light source offers high stability continuous-wave output. The radiation is emitted continuously and maintains a consistent level of stability. This stability is essential for ensuring reliable and predictable performance in lithography processes, reducing variations, and improving overall quality.
- In addition, the emitted radiation from the SSMB-EUV light source is clean and devoid of impurities. This cleanliness is advantageous as it minimizes potential interference or contamination that could negatively impact the lithography process and the quality of the produced patterns.
- Lastly, the SSMB principle exhibits scalability. It can be easily extended to shorter wavelengths, which opens up possibilities for future advancements in lithography technology. For instance, it holds the potential for the utilization of Blue-X lithography technology, which operates at a wavelength of 6.x nm, in the next generation.
In the end, what the Chinese scientists are actually working on is not an EUV machine, but rather a whole new type of EUV lithographic complex that could produce leading-edge chips in high volume.
In 2017, Tang Chuanxiang and Chao launched the SSMB experiment. Tang's team and their German partners led the theoretical analysis, physical design, and laser system development, achieving initial proof of principle. Their seminal paper was successfully published in
in February 2021.
Recognizing SSMB-EUV's importance for lithography R&D, China has since invested to construct a scientific facility in Xiong'an dedicated to SSMB research.
So SSMB-EUV is scientifically validated and engineering efforts are underway. The research team is committed to realizing SSMB-EUV, with ample funding approved. However considerable obstacles persist before industrial EUV lithography with SSMB can be achieved. Tempered expectations are prudent - the LPP-EUV approach took over 20 years from concept to implementation.
Nonetheless, under US pressure, China is compelled to aggressively pursue creative solutions like SSMB-EUV, combining ingenuity and engineering. With sufficient perseverance and resources, breakthroughs may not be so distant. This could be a game changer if China makes it work.
Yes, guy in the video definitely has some bias or he doesn't want to talk about the Chinese efforts because doesn't want controversy. Is just weird that in 2019 SSMB paper was published all over scientific press and he just ignored.