X-ray online full inspection technology improves IGBT yield
In the post-Moore era, the size of transistors is approaching the limit of the physical volume of atoms, and applications such as 5G, autonomous driving, artificial intelligence, and the Internet of Things are developing rapidly, requiring smaller chip sizes, lower power consumption, and stronger performance, which will inevitably lead to packaging The process is becoming more and more complicated, the reliability of the chip is reduced, it is easy to fail, and the yield rate is reduced. It can be solved from two aspects, one is that the chip material uses SiC and other materials, and the other is the chip packaging process.
1. XG5500 power device - welding defect
The XG5500 equipment mainly detects welding defects of power devices. It adopts 2D/2.5D online full inspection method. It is generally used in the production process of products. It can be applied to industrial-grade, consumer-grade, and automotive-grade IGBT modules. It is detected through online full inspection. Welding point defects, NG selection for defective products that do not meet the inspection items, to prevent defective products from flowing into downstream terminals.
2. XG5500 discrete device - line defect
The XG5500 dedicated model for discrete devices exclusively developed by Zhengye Technology has two highlights:①The detection efficiency is very highIt adopts the matrix image acquisition of the whole plate, no need to pull the coil material, has a CCD vision positioning system, and the robot automatically loads the material. It takes 3 minutes (3000pcs) to detect the 7-inch material plate, and the misjudgment rate reaches 3‰, basically can achieve 0 error Sentence;
Fast flat-panel CT (online full inspection)
Fast flat-panel CT equipment is mainly aimed at car-level chips, which can realize online full inspection. Automotive-grade chips have high requirements for air bubbles, especially for new energy manufacturers. The fast flat-panel CT of Zhengye Technology is a full 3D online automatic imaging and analysis, which can be used for online detection and offline analysis. Through CT tomography technology, it can solve the inspection of laminated solder joint defects that cannot be realized by traditional 2D/2.5D equipment, such as Open, HIP, QFP/LGA, etc. In terms of efficiency, it can detect an IGBT sample in 1~1.5 minutes, and the accuracy can be as low as 2μm.