SIRUI intelligently supplies Innosec, and ALD equipment supports the production expansion of 8-inch GaN-on-Si wafers
Qingdao Sifang Sirui Intelligent Technology Co., Ltd. (hereinafter referred to as "SIRI Intelligent") announced that Sirui Intelligent (July) signed a new ALD equipment procurement agreement with Innosec protocol. According to the agreement, SIRUI will supply Innosec with the Transform series of mass-production ALD deposition and coating equipment used in the front-end process of GaN semiconductor wafer manufacturing to support its 8-inch GaN-on-Si wafer production line expansion.
It is reported that, as a general-purpose technology, the ALD coating process can significantly improve the performance of gallium nitride power devices. For example, ALD films can be used for high-quality gate dielectric stacks, which help to improve device breakdown voltage, Leakage suppression and water and oxygen repellent effect. SIRUI Intelligent Transform series mass-production ALD deposition and coating equipment supports the configuration of multiple ALD process modules, compatible with thermal and plasma functions, and can be upgraded to cope with growing production capacity and new applications. Currently, it has entered Europe, North America, Well-known manufacturers in Japan, mainland China and Taiwan have achieved repeat orders.