Microconductor Nano Releases 2 Major New Products: The First Generation iTronix® Series CVD Film Deposition Equipment
On June 29 , SEMICON China 2023, the world's largest and most influential semiconductor event, was kicked off in Shanghai. At the event site, Jiangsu Microconductor Nano Technology Co., Ltd. (stock code 688147 , referred to as " Microconductor Nano " ) presented two major new products and officially released the first-generation iTronix® series CVD film deposition equipment independently developed by the company. This marks another breakthrough in the field of semiconductor thin film deposition by Microconductor Nano, and it is also a key step for the company's diversified layout to activate new growth drivers.
iTronix ® PE series plasma-enhanced chemical vapor deposition coating system can deposit different kinds of films, which can be applied to chip manufacturing in the fields of logic, storage, advanced packaging, display devices and compound semiconductors. At the same time, the new platform can be equipped with more reaction chambers to meet high production capacity requirements.
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iTronix ® LP series low-pressure chemical vapor deposition coating system adopts specially designed reaction chamber and electrical software integration services. It is widely used in the fields of logic chips , DRAM chips , NAND chips , etc. -Development and application requirements of Si , SiO 2 , SiN and other thin film deposition processes.
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As a leading enterprise in domestic atomic layer deposition ( ALD ) technology , Microconductor Nano has been deeply involved in the field of high-end thin film deposition equipment for many years. The revenue scale of ALD products ranks first among similar domestic companies. A variety of semiconductor ALD equipment covers logic, storage, and compound semiconductors. , new display and other subdivided application fields, the key process indicators have reached the international advanced level.
Driven by innovation, leading the future. The iTronix ® series of CVD thin film deposition equipment launched by Microconductor Nano is another milestone in the company's innovation road, greatly enriching the product matrix, and laying the foundation for the company to focus on ALD technology, CVD and other vacuum thin film technology gradient development. Strategic Positioning. At present, the iTronix ® series CVD film deposition equipment for microconductor and nanometer has received orders from customers, and the equipment verification is progressing smoothly. In the future, Microconductor Nano will provide customers with more choices and more excellent customized solutions, and continue to make efforts in the field of thin film deposition equipment.