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Oh. Then I wonder what US restrictions will be since if I'm not mistaken China's MIC has been producing lithography machines that are sufficient for 450 nm for a while now.SC chips are in the R&D and prototyping phase. there are zero mass produced commercial products. what is the purpose of shrinking the feature size when fundamental physics are being investigated?
the ones I know best are Josephson junctions, a superconductor-metal-superconductor junction. The critical point is the junction. The width of the junction must be carefully controlled - but because its a vertical structure, you can control it through deposition. Metals are deposited using highly controllable PVD. The lateral dimensions don't matter.
Non-Josephson junction superconducting chips seem to be built using even bigger feature sizes in the mm range.