Vacuum chambers get MUCH more expensive as lateral dimensions increase since it takes very strong walls to withstand atmospheric pressure and shapes such as solid blocks or cylinders to best resist pressure. Remember than 15 psi of atmosphere all around is a crushing 1.5 tons on a simple sphere with 4 inch radius.To the expert, why not develop the 18 inch? There are NO western equivalent and if successful develop together with SSMB we may see China leap frog the opposition.
The material has to be relatively expensive stainless steel or aluminum too, processed with expensive methods.
The wafers also get much heavier and thicker, as well as becoming absolutely impossible to move by hand and being 100% reliant on robotics.