Automatic Material Handling System situation in China
home-made breakthrough AMHS systems, the guarantee of fab utilization rate & yield rate
The full name of AMHS is Automatic Material Handling System, which is actually the equipment and system for material handling on the production line. As the production process of the production line becomes more and more complex, the material handling between the production line equipment by traditional manpower has become a bottleneck restricting production efficiency and production quality.
The AMHS system came into being and is widely used in high-end manufacturing scenarios such as wafer manufacturing, display panels, lithium battery factories, and photovoltaics. Of course, it's not that other scenes don't need it, but that it can't be used...
At present, the application of AMHS system in the semiconductor wafer manufacturing process has been very popular. Starting from the 8-inch fab, AMHS's AGV ground solution and OHT crane solution have been gradually introduced. In the era of 12-inch fabs, the AMHS crane solution has become standard. With the development of advanced packaging technology, AMHS has gradually entered the field of packaging and testing.
The AMHS solution of the semiconductor manufacturing plant is mainly divided into three types, the overhead unmanned transport vehicle (OHT crane), the clean storage system (STK) solution and the mobile robot (AGV) ground solution.
AMHS is a large system, including AMHS transmission hardware equipment (
OHT, AGV/AMR, Lifter, etc.), storage equipment (
Foup&Reticle Stocker, Reticle Cabinet, NTB, OHCV, OHB ), purification equipment (
TLP, OPS, FPS, etc. ) and software Systems (
MCS, OHTC, STKC, etc.).
Domestic manufacturers have also begun to make breakthroughs gradually. Some have entered the pan-semiconductor field to gradually improve product stability, and some have begun to gradually introduce wafer manufacturing links, and continue to accumulate scene experience through demos and small-scale tests.