The first research test on immersion lithography that I know was done by State Key Laboratory of Fluid Power and Mechatronic System, Zhejiang University in 2011. Cheetech was founded in 2013 to commercialize ultrapure water equipment, ultra high precision temperature- flow sensing and immersion lithography flow "hoods" units. A pretty obscure project that you have to scout academic papers and research institutions patents to get some information. I wasn't surprise when I first come to this forum that nobody knew that a immersion machine project was in development in China.
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Then first commercial companies that I remember to announce the project was SMEE in 2017 and U-Precision in 2018. It was suppose to be a 65nm immersion machine.
Zhejiang University:
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As same of other SMEE frontend machines didn't get much support or hurry from the industry because I guess of the mind of industrial managers they thought why I we are going to support this "lab experiment" when they have access to the best machines that ASML and Nikon can offer, everybody thought this machines are commodities therefore not subject to export restrictions.
SMEE:
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U-precision 2018:
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