Chinese semiconductor industry

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FairAndUnbiased

FairAndUnbiased

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tacoburger said:
I have my doubts about SSMB EUV. It's already hard enough to work with ASML EUV, it's the size of a truck, needs a team of PHD to operate and service it and needs a cargo plane to transport. Now imagine your EUV is dependent on a particle accelerator with a circumference of more than a hundred meters. Just a single section of that thing fails and your entire fab stops, maintenance work has to be immense.

It's going to be impossible to transport or export. You're going to have to assemble the particle accelerator on site and then build the fab on top of it. You can't assemble the entire thing in one centralized factory and ship it out. It's still going to need most the insanely difficult EUV competents an ultra-high vacuum, nanometre precise mirrors and focusing systems, ultra high precision laser interferometer etc etc. But add an particle accelerator on top of that. The money, maintenance and manpower is going to be immense.

Is the higher power EUV beam and lack of tin droplets going to be worth it?
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A particle accelerator as a light source can be built in a basement with 1940's tech. Can you build a LPP plasma source in a basement with 1940's tech?

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University_of_Michigan_synchrotron.jpg
 
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Overbom

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What would be the cost for building a SSMB EUV in a fab? Would it be commercially (or at least not too much expensive) competitive with ASML EUV?
 
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latenlazy

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Big news is that they’re already commercializing a 500 W LPP light source, which is double the power of ASML’s first fully commercial scanner and in line with the power output of ASML’s high NA scanner. Whichever other methods they might move to in the future they won’t have to rush if their first LPP scanner is comparable to ASML’s future state of the art commercial product.
 
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hvpc

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latenlazy said:
Big news is that they’re already commercializing a 500 W LPP light source, which is double the power of ASML’s first fully commercial scanner and in line with the power output of ASML’s high NA scanner. Whichever other methods they might move to in the future they won’t have to rush if their first LPP scanner is comparable to ASML’s future state of the art commercial product.
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Who is this “they” you inferred to have 500W LPP light source?
 
tphuang

tphuang

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Bids from past week. Looks like NAURA was a big winner here. SMEE got 2 orders of laser annealing tools from Huahong as @hvpc correctly pointed out. Overall, a lot of domestic firms winning bids. I'm continuously surprised to see US firms winning bids, even if for mature systems. Has Shanghai Jita and Huahong not learnt anything?
 
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