did he make any other comments about EUV? Looks like the various components are coming together now. Is it still CIOMP and SIOM leading the effort to create prototype?
Chinese semiconductor industry
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This is great, although I did not notice the numbers were this high based on those weekly reports. Must be something missing here.
This reminds me of the story of China disassembling S-70 Blackhawks in order to be able to service it post-TAM. Got to the point they were able to replace the smallest nuts and bolts.
so I think we can feel at ease that SMSC fabs can keep functioning for the foreseeable future.
SSMB isn’t the same technology as LPP. Very different approaches.
I'm just asking about EUVs in general. I know SMEE is not working on it, but maybe he has some insider knowledge of the program progress.
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I have my doubts about SSMB EUV. It's already hard enough to work with ASML EUV, it's the size of a truck, needs a team of PHD to operate and service it and needs a cargo plane to transport. Now imagine your EUV is dependent on a particle accelerator with a circumference of more than a hundred meters. Just a single section of that thing fails and your entire fab stops, maintenance work has to be immense.
It's going to be impossible to transport or export. You're going to have to assemble the particle accelerator on site and then build the fab on top of it. You can't assemble the entire thing in one centralized factory and ship it out. It's still going to need most the insanely difficult EUV competents an ultra-high vacuum, nanometre precise mirrors and focusing systems, ultra high precision laser interferometer etc etc. But add an particle accelerator on top of that. The money, maintenance and manpower is going to be immense.
Is the higher power EUV beam and lack of tin droplets going to be worth it?
It's going to be impossible to transport or export. You're going to have to assemble the particle accelerator on site and then build the fab on top of it. You can't assemble the entire thing in one centralized factory and ship it out. It's still going to need most the insanely difficult EUV competents an ultra-high vacuum, nanometre precise mirrors and focusing systems, ultra high precision laser interferometer etc etc. But add an particle accelerator on top of that. The money, maintenance and manpower is going to be immense.
Is the higher power EUV beam and lack of tin droplets going to be worth it?
BRO Its not meant for export and they have the experience using The Shanghai Synchrotron Radiation Facility (SSRF) so they had a precedent and came out a perfect solution to their needs. I may say the Chinese will covered all bases not only in SSMB but also LPP and DPP as well.
A-Set has a good summary of the progress of EUV
Lol Synchrotrons are mechanically much simpler than plasma produced light sources. Just because it’s bigger doesn’t mean it’s harder. Also why would China want to export this instrument? The point is to have something for domestic production.
Dealing with things like liquid tin debris and excitation optimization of droplets and maintaining a high vacuum environment and material corrosion of reflective surfaces inside the light accumulator chamber are all much more difficult problems than accelerating electrons in a tube faster and faster with a magnet. The only reason SSMB isn’t already a leading candidate is because it’s a very new method that needs to be validated and it requires infrastructure which might change how fab processes get organized. It’s obviously not a great solution if you want to build a private export business with a product that needs to be compatible with pre-existing facilities in fabs, but if you’re pursuing a public/private model for domestic use those kinds of limitations imposed by business concerns don’t exist anyways.
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