havoc:首台样机21年6月就完成了。光刻机是02重大专项的子课题,由谁来验收可以参考当年90nm光刻机的验收情况。
The first prototype of immersion DUV was completed in June 21. The lithography machine is a sub-project of the 02 major special project. Who will check and accept it can refer to the acceptance of the 90nm lithography machine in that year.
The first prototype of immersion DUV was completed in June 21. The lithography machine is a sub-project of the 02 major special project. Who will check and accept it can refer to the acceptance of the 90nm lithography machine in that year.