Zhongwei Company (AMEC): CCP capacitive high-energy plasma etching equipment continues to receive bulk orders from many customers
According to news from Jiwei.com, recently, China Microelectronics said in an institutional survey that according to the company's preliminary statistics, the composition of operating income in 2022 is mainly based on etching equipment and MOCVD equipment.
It is reported that the company's CCP capacitive high-energy plasma etching equipment continues to receive batch orders from many customers, and its market share continues to increase. A total of 2,320 reaction tables have been operating in the production line. In the world's most advanced 5nm chip production line and the next-generation more advanced production line, the company's CCP etching equipment has achieved multiple batch sales, and more than 200 reaction tables have been operating in the production line. Since the company's ICP inductive low-energy plasma etching machine was launched, it has continuously approved more etching applications, rapidly expanded the market and received bulk orders from leading customers, and has been used in more than 20 customers including logic, DRAM and Mass production of more than 100 ICP etching processes has been carried out on various chip production lines such as 3D NAND, and it has continued to expand to the verification of more etching applications, with a strong development momentum. The 8-inch and 12-inch deep silicon etching equipment, which also uses ICP technology, continues to receive bulk and repeated orders in the etching markets such as advanced system packaging, 2.5-dimensional packaging and micro-electromechanical system chip production lines.