Chinese semiconductor industry

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ansy1968

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One possibility is that SMEE is using a different work stage for their current prototypes. Another possibility is that SMEE is using U-Precision stages but these are pilot or prototype builds. R&D itself is not complete until you’ve finished *all* testing needed to meet some requirement standard or certification and you are not making any further changes to the initial production run. Sometimes products can still be finishing R&D, especially under verification or validation testing, while the production run has already started, because observation of performance under customer adoption is necessary to complete the testing requirements before you can comfortably lock a design for production.
Sir you explain it perfectly, it's China first foray, like the J20, use a matured foreign component to further its development while a parallel testing is being done on the replacement, this a fast way to commercialized the product.
 

tphuang

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One possibility is that SMEE is using a different work stage for their current prototypes. Another possibility is that SMEE is using U-Precision stages but these are pilot or prototype builds. R&D itself is not complete until you’ve finished *all* testing needed to meet some requirement standard or certification and you are not making any further changes to the initial production run. Sometimes products can still be finishing R&D, especially under verification or validation testing, while production run and customer delivery has already started, because observation of performance under customer adoption is necessary to complete the testing requirements before you can comfortably lock a design for production.
I think the more likely case is that they don't need this dual stage table for SSA800. Maybe that's something under development for the second generation or an improved version. There is also grating inferometer that havok talked about. Looks like the version that was certified in 2021 is not as good the version now that's getting delivered to customer for validation. And it's likely they will get another further improved version a year from now. I don't think we need to be too concerned about it.
 

latenlazy

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I think the more likely case is that they don't need this dual stage table for SSA800. Maybe that's something under development for the second generation or an improved version. There is also grating inferometer that havok talked about. Looks like the version that was certified in 2021 is not as good the version now that's getting delivered to customer for validation. And it's likely they will get another further improved version a year from now. I don't think we need to be too concerned about it.
I’m just listing different possibilities for how to interpret and make sense of havok’s comments. Frankly any of these explanations are possible. The point is the comment is not as bizarre as it might sound to some people.
 

olalavn

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According to own U-Precision they send 85 dual wafer stage prototypes
View attachment 104372
The technologies developed in the DWSi is not just for immersion but also EUV, because is maglev, they are aiming to less than 2.0 nm matching precision I guess closer to ASML. That and the research for advanced grating measuring devices was done also 2021.

View attachment 104373

Their goal for now is to have a domestic immersion tool that can allow a 28nm process with reasonable performance. Any bottleneck is going to be, is in the process of or already has been solved.
I am waiting for Immersion equipment of Zhejiang Qier Electromechanical Co., Ltd...
 

tokenanalyst

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SMEE has their own immersion Equipment... I think they will make an official announcement about it soon
Usually this subsystems are being co-develop between them, SMEE have patent for a immersion head similar to Cheertech, but they don't have any on the other subsystems like the liquid delivery systems,Vaccum systems, the liquid recovering system, the cleaning systems and temperature control systems. Most of those are from CheerTech and Zhejiang University

1672879283223.png
 

PopularScience

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Havok has spoken.

Because there is only an engineering prototype of the immersion workpiece table, it is still in the research and development stage. R&D can only be completed when the commercial machine is delivered

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因为现在只有浸没工件台工程样机,所以说还在研发阶段。等交付了商品机才能叫研发完成
 

ZeEa5KPul

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Havok has spoken.

Because there is only an engineering prototype of the immersion workpiece table, it is still in the research and development stage. R&D can only be completed when the commercial machine is delivered

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因为现在只有浸没工件台工程样机,所以说还在研发阶段。等交付了商品机才能叫研发完成
Well, it seems I got worked up over a technicality.
 
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