I mean that's the announced max capacity. It's not out of normal for Chinese companies to then do second phases that expand things further. We don't know what DUVi it will use. I'm just speculating, since it will be continually getting new machines for a few years and there is a good chance we will see some kind of sanction from Dutch gov't by then.
so, we've seen a couple of these announcements about Arf process coating or tools launching in the past couple of weeks. Can these be used for both Arf dry and immersion process? Do these announcements complete their domestic 28 nm process?Shengmei Shanghai's first front-end ArF process glue coating and developing equipment, Ultra LITH, was launched smoothly
Recently, Shengmei Shanghai (Stock Code: 688082), the first rubber coating and developing Track equipment with independent intellectual property rights, Ultra LITH, successfully launched the machine, and successfully delivered the first front-end ArF process rubber coating and developing Track equipment to Chinese domestic customers. The equipment was shipped by Shengmei Semiconductor Equipment (Asia Pacific) Manufacturing Center, which is an important step for the company to enhance its expertise in the field of gluing and developing.
In addition, Shengmei Shanghai will launch the i-line model equipment in 2023, and the company has started to develop the KrF model equipment. The shipment of Ultra LITH, the pre-coating and developing Track equipment, is another achievement of Shengmei Shanghai's continuous expansion of product series. The company is committed to becoming a wafer-level process solution platform. Its products also include single-wafer and tank-type wet process. Cleaning equipment, electroplating equipment, stress-free polishing equipment, vertical furnace tube equipment, and PECVD equipment.
Moore threads have linked up with Tongfang computers to secure desktop order from a major telecom company. The model is TK630-V050-1 . I guess it's so new that they don't have any specs for it on the website yet. But it claims to use their latest S30 GPU. Keep in mind that they've already scored quite a few orders based on the announcement 2 days ago. This seems like a new order.
I think both, Kingsemi and ACM track tools support ArF immersion lithography. Yes, this a great for filling the gaps in China lithography ecosystem and supply chain.
so the official release here from Kunlun
It is very likely that Huawei/CAS has made a breakthrough in LPP Light Source development in order for Huawei to publish such a EUVL Patent.@WTAN Sir is this the 200W LPP light source that we keep on hearing from the grapevine? IF true then RS laser had a breakthrough, with it maybe a 90W or 120W power source for the mythical 22nm SSA 900 DUVL?
@olalavn Sir we may see a working prototype next year exactly the timeline you gave for IOC in 2024.
ACM's tool doesn't yet cover DUV ArF immersion, as far as I know. My understanding is that they are qualifying their ArF tool at a customer beginning this quarter, they will begin qualifying their i-line tool in the later part of 2023, and also do KrF in 2024.