Kingsemi latest immersion 28nm Glue developing machine.
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"As the third-generation model independently developed by Xinyuanwei, the submerged high-capacity adhesive developing machine has the advantages of high productivity, high process capability, high cleanliness, high scalability and easy maintenance. Currently, this model It has passed the client verification, met the customer's mass production requirements, successfully broke the foreign monopoly, and filled the domestic gap," said Cheng Hu, director of the front-end design department of Xinyuan Micro.
"This model adopts an original symmetrically distributed high-capacity architecture, fully equipped with 36Spin processing units, equipped with a two-way synchronous pick-and-place manipulator independently developed by the company, which can greatly improve the mechanical transmission capacity and transmission accuracy of the whole machine, and can match the world's mainstream lithography Machine-on-line production can achieve more than 300 pieces of production capacity under complex processes. In addition, the machine is equipped with the company's precise temperature modulation (PTM) technology, which makes the baking temperature uniformity of the hot plate reach the industry-leading level; the new Spin unit Real-time control technology can effectively improve the accuracy, responsiveness and stability of machine motion control and fluid control, and continuously reduce costs for customers; optimize the design of the flow field of the whole machine through simulation to ensure a uniform and stable internal micro-environment and improve the cleanliness of the whole machine Level; a full series of auxiliary function units, including AOI, WEE systems, etc., can detect wafer process defects on-line and reduce the outflow of defective products." "This model can fully cover I-line, KrF, ArFdry, ArF through optional configuration Various lithography technologies such as immersion type are also applicable to other spin-coating applications including SOC, SOH, SOD, etc. In order to cope with the continuous improvement of the production capacity of lithography machines in the future, this model can also be expanded to more processing units, Expanding from the current 36 spins to 48 spins, the production capacity is increased to 360 pieces per hour, and at the same time, it realizes easy maintenance of the machine with a small footprint, effectively improving the maintenance efficiency of the machine.”
Since its establishment 20 years ago, the company has always focused on the field of rubber coating and developing technology, which can be said to be a sword in the past 20 years. The successful launch of the front-end immersion-type high-capacity glue-coating developing machine will further enrich the company's product structure, realize the company's full coverage of the 28nm and above process nodes in the front-end wafer processing link, and continue to move to a higher process level Iterate, consolidate and enhance the company's technological competitive advantage in the industry.
Mr. Zong Runfu, chairman and president of the company, said: "This is another important milestone in the development of the company. We are very pleased to see that more and more domestic customers are already accelerating the process of importing domestic high-end glue-coating and developing equipment. In the future, Xinyuan Micro will continue to be committed to product innovation and technological improvement, provide customers with better comprehensive technical solutions and service solutions, create value for customers, and become a world-class enterprise respected by the society."