I know little about the semicon industry other than what I read from articles. Definitely far from expert like you and a handful of others here. I do know the basics well enough that certain things are very obvious. The first SSMB based fab in China will probably have something like 40+ beams tuned to 11.2nm using Molybdenum Beryllium Bragg mirrors. They can ramp up the power to whatever they want or need with a synchrotron, eventually even to thousands of watts source power. Even then, as you mentioned, collimated radiation is very efficient relative to LPP. This has the added bonus of requiring fewer dielectric mirrors. Even the photoresists would perform better because of reduced incidence of under or over exposure with collimated radiation as well as no issues with beam shaping. When we consider the simpler layout, simpler maintenance, greater efficiency, lower variable costs and translate that into production costs, I completely agree, it is like the revolution from incandescent to CFL. As someone else said here, it will be a BLOODBATH!Damn, asking the real questions. Are you in semiconductor industry?
Synchrotron EUV source is really good for those reasons - maintenance, tunability and power.
For example 13.5 nm EUV absorbance causes photopolymerization of even ppb organics onto optical surface, which requires vacuum wafer chamber and H2 purging of optics chamber. The Sn droplet is more or less isotropic emitter so the EUV radiation is not collimated by default. and you have to have a Sn contamination management system.
Synchrotron is clean (no vaporizing tin!!), tunable as you said and very high output.
IMO a successful synchrotron EUV source would be like the revolution from incandescent light bulb to CFL.
Where did you get the figure of 81 Arfi lithography machines from?
That actually matches up with the total produced per year, and China didn't buy them all.
Also, there are reports of ASML losing $2.78 Billion in revenue from a DUV ban.
If you assume an average selling price of $70 Mn for an Arfi, that is still only 40 machines.
Sources below
archive.ph/46jDP
finance.yahoo.com/news/tech-war-broader-ban-asml-093000858.html
EDIT
Yep, 81 Arfi was the total number from ASML to all markets
archive.ph/7IZGu
Sir is this your YT channel? From @Oldschool old post he said 80 units last year and in the first quarter of this year 23 units were delivered, so I think they will able to match last year delivery for 2022.Yes, it seems like certain sources I was looking at misinterpreted that total as just for china when the original source was referring to all sales. If you just Google china asml 81 duv, you will see quite a few sites that misinterpreted the Bloomberg article. European guy also posted his asml data a page before my post.
Also, it takes a long time to do research on some of these pieces I put together. Be a little more respectful and do a little googling and read a couple of pages of this threads before these posts before demanding to know the sources. It's extremely discouraging for someone like myself who spent long time looking up sources and translating them.
Official ASML financial report for first half of 2022
First half 2022 | |
---|---|
EUV | 15 |
ArFi | 39 |
ArF dry | 14 |
KrF | 64 |
I-line | 21 |
Full year 2021 | |
---|---|
EUV | 42 |
ArFi | 81 |
ArF dry | 22 |
KrF | 131 |
I-line | 33 |
For better clarification, I directly post the tables of sold units worldwide. There is not a split of units by region, so we can only assume the number of units delivered to China using the "revenues by region" table provided in the reports.
I add also official numbers of 2021, took from here at page 187:
First half 2022 EUV 15 ArFi 39 ArF dry 14 KrF 64 I-line 21
Full year 2021 EUV 42 ArFi 81 ArF dry 22 KrF 131 I-line 33
Fire in a plant back in Jan that affect euv deliveryQuite big drop of the sales of EUV in 2022 compare to 2021, why is that ?
Quite big drop of the sales of EUV in 2022 compare to 2021, why is that ?