The ASML page seems a bit light on comparable specs, but let's take Gigaphoton, a supposed competitor to Cymer.
Gigaphoton lasers have been integrated into at least a single lithography system, and I said that the Russian laser could be integrated onto a Chinese lithography system.
Wavelength | 193 nm |
Average Output | 45 W |
Pulse Energy | 11.25 mj |
Repetition Rate | 4,000 Hz |
Bandwidth (FWHM) | 0.2 pm |
Bandwidth (E95) | 0.5 pm |
Pulse repetition: same as Russian
Pulse energy: 1/2 Russian
Average output: 1/2 Russian
Bandwidth: Russian laser is 17-20 ns pulse duration,
, we call λ = 193 nm, c = 3×10^17 nm/s, t = 20*10^-9 s, Δλ = 0.006 pm. So achieving a 0.2 pm bandwidth is nowhere near the physical limit and is plausible. They do not give this spec but it is possible to see that if they claimed a 0.2 pm bandwidth as well, it wouldn't be bullshit.
So what's the problem with my statement? I never said it was
comparable to Cymer, I didn't have enough data, I just invited the viewer to compare some basic specs. I can say it is comparable to Gigaphoton though, and Gigaphoton is a competitor of Cymer, so yes, by definition of comparable, the Russian laser is comparable to Cymer.