Not related to China but looks like this Russian company has been marketing this impressive High power, high repetition rate excimer laser for lithography, especially for maskless lithography. A direct excimer laser writing system would be much slower than a projection system but a bit more faster than a E-Beam system. Maybe It could fill the gap for chips for the Russian Mil. Also could be interesting if they collaborate with China in this area.
It reminds me of this Chinese company that marketed the first KrF maskless system I've ever seen.
It reminds me of this Chinese company that marketed the first KrF maskless system I've ever seen.