Two less known efforts in Chinese lithography apart from SMEE and CETC.
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A presentation on NIL from germanlitho
WLP-8
WLP-8 maskless direct writing lithography equipment is used in mass production direct writing lithography equipment in advanced packaging and chip manufacturing fields such as wafer level packaging, system level packaging, board level packaging, power devices, discrete components, etc., lithography The precision can reach the minimum line width of 2μm, and the production capacity is 30-60 pieces/hour. It supports the RDL function of advanced packaging and chip manufacturing, and is suitable for use in mass production lines such as pilot test and production.--------------------------------------------------------------------------------------------------------------
A presentation on NIL from germanlitho