I think they already have the prototype working and they have been testing photo-resist polymers with it, you can read my previous post. Remember that this is an alternative EUV light source, this is not and i repeat a complete EUV tool. The parts of a lithography tool are the optics, the electro-mechanical workbench and the metrology system. This is just the light source.
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Chinese semiconductor industry
- Thread starter Hendrik_2000
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I think they already have the prototype working and they have been testing photo-resist polymers with it, you can read my previous post. Remember that this is an alternative EUV light source, this is not and i repeat a complete EUV tool. The parts of a lithography tool are the optics, the electro-mechanical workbench and the metrology system. This is just the light source.
No what the poster above from Tsinghua in 2021 says is they have done tests in Germany in infrared and have funding to build an EUV test facility in China. They haven't even started building the test facility yet. What China does have is LPP and DPP light sources which they use for testing but those are low intensity and not adequate for fabrication yet.
Yeah the schematic makes it seems like you could have multiple stages on the ring. I'm sure they will find a way to optimize for it when the time is ripe.Probably, is like 30-50m in diameter so the size could been seen as an drawback but the ring is thin so i don't think will be occupying a lot of space, from i have been reading and understanding the plan will be to built the ring as part of the fab and will serve multiple EUV tools at the same time, as you see in the schematics the same ring is being used for:
1-EUV mask research.
2-EUV lithography research.
3-EUV fundamental physics.
As far as I understand the experiments were carried out in Germany in 2019, the paper was published in nature in February 2021, in 2019 the Chinese team said that it was going to build a facility in China in the 2019 EUVL workshop that was the one that I posted earlier, according to this information The Chinese team has been experimenting in 2021 my guess in the Tsinghua facilities with photopolymers using euv radiation from the ring.
antiterror13
Brigadier
I don't think so, the Europeans may be U.S. lapdogs to some extent but they are not blind fools.
definitely not France, France can say freely opposing the US, perhaps somewhat Germany, I don't see others
With the horrible the France is been treated lately i would not be surprise.definitely not France, France can say freely opposing the US, perhaps somewhat Germany, I don't see others
antiterror13
Brigadier
Yes Tsinghua is doing SSMB. Shanghai Inst is doing LPP.
Anybody in China doing DPP research?
antiterror13
Brigadier
The litho machine is done, they are just tweaking the yield. Huawei has state support so they can produce regardless of the yield to get the phone out a year or 2 earlier.
What are you talking about? what are you referring to?
@antiterror13 Sir HIT (Harbin Institute of Technology)?Anybody in China doing DPP research?
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