Yes Tsinghua is doing SSMB. Shanghai Inst is doing LPP.
Chinese semiconductor industry
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Article says the test was done in Berlin. Does China not have the necessary facilities/instruments to do it domestically?
According to the presentation made at the workshop in 2021, research and development for the use of SSMB for lithography is being carried out in China.
Definitely CAS is still working on tin LPP as a light source for EUVL, my guess once the manage to get it working (100W+) they will start to commercialize it probably with RSLASER or as another commercial spin off of CAS to get investors.
If Tsinghua manages to develop SSMB as a light source for EUVL, due to the technological difference between SSMB and LPP, I imagine that they will have to create a company other than RSLaser to commercialize the technology.
If Tsinghua manages to develop SSMB as a light source for EUVL, due to the technological difference between SSMB and LPP, I imagine that they will have to create a company other than RSLaser to commercialize the technology.
Can they miniaturize this concept?
Circumference 100~150m seems quiet big?
5 years to build a prototype and another 5 years to get it into a viable commercial lithography machine. At best.
I wouldn't be expecting much of SSMB. I think it is fine to fund it for long term but in the short term it won't be useful.
Miniaturization is less important than viability in industrial setting in terms of light quality and ability to distribute the light across factory floor plan as well as light efficiency and cost effectiveness.
I wouldn't be expecting much of SSMB. I think it is fine to fund it for long term but in the short term it won't be useful.
Miniaturization is less important than viability in industrial setting in terms of light quality and ability to distribute the light across factory floor plan as well as light efficiency and cost effectiveness.
Probably, is like 30-50m in diameter so the size could been seen as an drawback but the ring is thin so i don't think will be occupying a lot of space, from i have been reading and understanding the plan will be to built the ring as part of the fab and will serve multiple EUV tools at the same time, as you see in the schematics the same ring is being used for:
1-EUV mask research.
2-EUV lithography research.
3-EUV fundamental physics.
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