Norric Optics delivers critical dimension (OCD) measurement equipment to advanced process customers in China again.
Shanghai Norric Semiconductor Equipment Co., Ltd. (Norric) has successfully delivered its second Optical Critical Dimension (OCD) measurement system, known as NKShape, to a domestic advanced process customer in China. This follow-up delivery builds on the company's initial success with its first unit to a leading local client, both of which were met with positive reception upon deployment. Driven by strong market demand for independent solutions capable of handling cutting-edge semiconductor manufacturing, Norric aims to establish itself as a key player in the global supply chain through this strategic expansion.
Norrico's NKShape series is engineered specifically for advanced process nodes, supporting technology ranges from 28nm and 14nm down to FinFET logic products at 7nm, 5nm, and beyond, alongside critical dimension metrology for DRAM and 3D-NAND memory. The system addresses complex structures such as Planar Gate, FinFET, DRAM, and 3D-NAND across various process stations, including post-etching (ADI/AEI) and chemical mechanical polishing (CMP). It measures essential parameters like linewidth, trench depth, sidewall tilt angles, and specific material layer heights to ensure high precision in chip fabrication.
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A significant differentiator for Norric's equipment is its self-developed next-generation algorithm architecture, which offers three major advantages over legacy systems from leading overseas suppliers like KLA+ and ONTO. First, by utilizing a modern computing engine and parallel processing technology, the system achieves modeling and library generation speeds at least ten times faster than US vendors while maintaining robust machine learning capabilities. Second, it drastically reduces hardware requirements for customers; 2D structure modeling can be performed on a standard laptop, whereas more complex 3D structures require only a basic workstation rather than expensive supercomputers. Finally, the integration of automatic intelligent algorithms and AI significantly lowers the barrier to entry for engineers by reducing the difficulty involved in system calibration and usage.
Founded in 2022 with a core team comprising senior technical experts formerly from KLA+'s FaST business unit, Norric leverages decades of global industry experience to develop front-end semiconductor metrology equipment. By focusing on independent intellectual property rights and overcoming historical monopolies held by American companies, the company is committed to creating a viable domestic OCD solution that meets rigorous international standards. As the first delivery demonstrates, Norric is positioned to become a leading Chinese enterprise in advanced IC manufacturing tools, driving innovation across the semiconductor supply chain.
