Room-temperature bonding breakthrough! SiC-based lithium niobate thin films help SAW enter the high-frequency era
As 5G evolves into millimeter-wave bands and radar systems demand higher performance, traditional surface acoustic wave (SAW) filters are limited to frequencies below 3 GHz due to substrate constraints. Bulk acoustic wave (BAW) technology offers higher frequency operation but faces high costs and poor thermal stability.
Qinghe Jingyuan Semiconductor Technology (Group) Co., Ltd. has developed a silicon carbide (SiC)-based lithium niobate (LiNbO₃) thin film substrate using proprietary room-temperature bonding technology, enabling SAW devices to operate efficiently in high-frequency applications—marking a major leap forward for RF filtering.
Key performance highlights:
-Resonator Qmax reaches 710 at 5 GHz
-Electromechanical coupling coefficient (K²) exceeds 20%
-Strong RF performance across critical 5G bands including N77 and N78
The technology overcomes the challenges of bonding SiC and LiNbO₃—materials with significant thermal expansion differences—through surface activated bonding (SAB) under ultra-high vacuum at room temperature.
Core innovations:
-Atomic-level interface control: surface roughness < 0.5 nm, enabling covalent bond formation
-Eliminates thermal mismatch stress by avoiding high-temperature processing
-High-precision alignment with ±1 μm mark accuracy and pressure uniformity within ±3%
-Bond strength exceeds 10 MPa across the entire interface
The solution has achieved large-scale production of 6-inch SiC/LiNbO₃ wafers, with mass production yield exceeding 95%. It is already validated for use in existing 5G systems and poised for wider deployment.
Qinghe Jingyuan is a high-tech leader in semiconductor bonding and integration. The company specializes in advanced packaging, heterogeneous material integration, MEMS sensors, and wafer-level processes. Through its dual-engine model of equipment development and process services, it offers fully integrated solutions with proprietary technology across four product lines.
This breakthrough positions SiC/LiNbO₃ as a scalable, high-performance alternative to BAW—accelerating innovation in 5G-Advanced, 6G, and beyond.
-Reduces filter manufacturing costs by over 30% compared to BAW
-Expands operating temperature range by up to 50%
-Enables next-generation applications in millimeter-wave communications, satellite internet, and intelligent driving radar