NAURA advances in PVD (Physical Vapor Deposition) equipment.
As a pioneer in China's PVD process equipment technology, Northern Huazhuang started the research and development of PVD equipment as early as 2008. After sixteen years of technological accumulation and innovative breakthroughs, it has released a number of mass-produced PVD equipment, with cumulative shipments With over a thousand cavities, it has become the largest solution provider of PVD equipment in China
Since its establishment, Northern Huachuang's PVD Division has made breakthroughs in many key technologies such as magnetron sputtering source design, plasma generation and control, chamber design and simulation, particle control, and software control, and has established core technological advantages. It has achieved the industrialization of equipment and process coverage of metallization processes for logic chips and memory chips. As of the end of 2023, process equipment such as Cu (copper) interconnection, Al Pad (aluminum pad), Metal Hardmask (metal hardmask), Metal Gate (metal gate), and Silicide (silicide) in the integrated circuit field are stable at the client end It has been put into mass production and has become the baseline equipment for many customers, and has become the industry's first choice. Among them, Metal Gate (metal gate) PVD products have successfully achieved mass production breakthroughs in the 28nm metal gate core process; Cu (copper) interconnection PVD products support Inter Metal (internal interconnection lines) and Top Metal (top interconnection lines) Mass production of processes; Al (aluminum) PVD products are used in large quantities in different fields such as logic, DRAM (dynamic random access memory), 3D NAND (flash memory), covering all processes such as Pad (aluminum pad), RDL (redistribution layer), etc. application.
By the end of 2023, the Northern Huachuang PVD team has developed more than 30 systematic equipment solutions for metallized film deposition processes in the pan-semiconductor field. Among them, thermal Al PVD products have excellent Al filling capabilities, and back gold PVD products have good warpage control capabilities. Both PVD products have been fully used in the mass production of power semiconductor front and back electrode processes; Ti, Cu, TSV PVD products such as TiN, Al, AlN, ITO and other PVD products are used in mass production of advanced packaging UBM, RDL, and TSV processes by virtue of their core advantageous technologies such as low temperature, low damage, and high coverage. Features such as roughness, low stress, and high crystal quality strongly support the R&D and mass production of customers in the fields of silicon-based micro-displays, MEMS, and semiconductor lighting.