Chinese semiconductor thread II

sunnymaxi

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Shanxi CETC successfully delivered third-generation horizontal silicon carbide chemical vapor deposition equipment

The equipment shipped this time is the third-generation horizontal silicon carbide chemical vapor deposition equipment developed by Shanxi China Electronics Technology Co., Ltd. with a new design concept . Its structural design and process technology are independently developed by the company. The equipment adopts a high-precision temperature control system, which can accurately control the temperature difference of the graphite substrate within 1°C to ensure the stability of the process; the CFD numerical simulation technology is used to optimize and adjust the equipment structure and process parameters, effectively improving production quality and efficiency.

After many times of process optimization and debugging, the equipment can successfully achieve a purity of coated products ≥ 99.9999%, a thickness of silicon carbide coated products of 100μm±10%, and key technical indicators such as main crystal form, crystal orientation, and hardness have reached the domestic leading level .

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tphuang

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