I think there was certain facilities of SMIC that ASML was not allow to service, there was even a hearing by the "Anti China" group complaining about facility by facility basis of the sanctions and that SMIC was using "tunnels" to servicing their tools.Are you sure? From what I remember ASML is still allowed to service those including the ones in SMIC 7nm.
IIRC, what was done in 2022 was ban US equipment and personnel from advanced fabs in China. So complete cut off from US companies. In accordance with that, ASML pulled their US personnel from China, but they continued their service using employees from other countries. That was the time Jordan Schneider did the famous "annihilation" tweet.
Then at the end of 2023 they were banned from exporting DUVi for advanced fabs, but were still allowed to service existing tools.
Towards the end of 2024 Dutch government introduced a licensing requirement to service, but as far as I know they haven't refused to give that license so far.
Do you think Chinese local companies doing it? I believe so, as the 7nm production still going even higher
They may have learned to do it, have seem several independent companies offering servicing of ASML scanners, I have seem patents of companies like SMIC and other companies on servicing like cleaning the immersion heads and China overall supply chain is being made not only to supply parts and subsystems to SMEE but also to service and even hardware upgrade Nikon and ASML machines. Like UPrecision dual stages are made to be compatible to ASML ones, RSLaser excimer lasers are being made to compatible with Cymer lasers, Gouwang optical job statement says that their companies will not only supply optical sub-systems for SMEE but also give maintenance to existing machines.



