Yuntian Semiconductor: Glass substrate wafer-level products are first launched
The fan-out packaging based on glass substrates is progressing very fast. Although the panel-level glass substrate based on through-glass vias is in full swing and advancing rapidly, global industrialization has not yet really begun. For the actual commercialization and large-scale application of glass-based products, glass wafer-level packaging is currently at the forefront.
As the first manufacturer in China to realize mass production of glass wafer-level packaging, Xiamen Yuntian Semiconductor Co., Ltd. takes the innovation of microsystem integration technology and the promotion of the development of the semiconductor industry as its mission. In terms of technical products, Xiamen Yuntian Semiconductor focuses on 5G RF, IoT, power devices, AI (CPU/GPU), biomedicine, and emerging application fields. It currently has more than 100 customers, including more than 20 key customers from leading companies. In advanced packaging, it has achieved the industrialization of 4/6/8/12-inch wafer-level 3D packaging, fan-out packaging, and 2.5D glass 3D packaging, and has made great progress in RF filter 3D packaging, power device metallization, integrated passive devices, inductors/capacitors/resistors, filters/antennas.
In the field of glass through-holes and devices, Yuntian Semiconductor has taken the lead in developing IPD integration technology based on glass substrates, including a series of IPD devices such as capacitors, inductors and passive filters. In terms of glass-based inductors, at 0402 size and 1GHZ frequency, samples with an inductance of 13.57nH and a Q value of 53.93 can be prepared. At 500MHZ frequency, the overall inductance is 1.58~13.03nH, and the Q value is 30.93~43.22nH. In terms of TGV-based DTC technology, a low-cost DTC process is developed, with a glass-based array blind groove structure with an opening of 15 µm, a depth of 250 µm, and a width of 250 µm. ALD and CVD are used to prepare capacitor metal-insulator-metal stacks to obtain a DTC capacitance density of 68 nf/mm².