Guangzhou Micro-Nano's Yang Zhenyu: From mass production of photoresist to next-generation photolithography materials.
In order to accelerate the localization of Arf photoresist and solve the problem of the country being stuck in this regard, we established Guangzhou Micro-Nano Photolithography Materials Technology Co., Ltd. in Guangzhou in April 2020, focusing on the
localization and internationalization of high-end photolithography materials, led by Arf photoresist .
Advantages of Guangzhou Micro-Nano:
Independent raw material technology: Complete photoresist research and development without a photolithography machine!
Performance beyond commercial standards: 193 nm dry photoresist product performance indicators
It completely surpasses commercial photoresists in Europe, the United States and Japan, fills the domestic gap and has international competitiveness.
Light asset operation: light asset model and low operating costs.
Deep customer resources: The team includes many senior lithography experts with more than ten years of experience. They have worked in well-known companies such as Intel and SMIC and have extensive customer resources and industry connections.
Strong supply chain: Complete OEM supply chain to ensure product quality and supply.
In the year our company was founded, we were fortunate to be surveyed by Shiyin and were listed, along with Nanjing University of Science and Technology Optoelectronics and Bokang, as one of the earliest companies in China to achieve technological breakthroughs in Arf photoresist.
Guangweinano industry chain: Guangweinano mass-produces photoresist + Zhuhai Yatian mass-produces photoresist resin (exclusive supply)
That is to say, from the core raw materials of photoresist to the formula of photoresist, we have independent intellectual property rights developed independently.
The layout of Guangweinano's independent intellectual property rights covers photoresist resins, photoresist photosensitizers, photoresist formulas, etc.
At present, Guangweinano's Arf photoresist products have covered lithography patterns such as lines and holes from 90 nanometers to 28 nanometers. Compared with some international commercial photoresists from Europe, the United States and Japan, some performance of the photoresist is also fully on par with or even surpasses them.
The results obtained from the customer's product line prove that the OPC and Pattern Defect performance of Guangweinano's products are basically consistent with those of POR glue.
Advantages of Guangweinano ArF photoresist technology:
Technical advantage 1: High resolution - 80/80 nm and dense Line/Space patterns can be easily imaged under annular illumination, reaching the limit requirements of dry ArF lithography, and the highest resolution of wet ArF lithography is pushed to 40/40 nm.
Technical advantage 2: Large process window - DOF is the most important performance indicator of lithography. A large DOF means a wider process window and potentially better yield performance for customers.
Technical advantage three: Large aspect ratio - the aspect ratio can be as high as 4. With the same thin line width, the film thickness is thicker without collapse, and the etching resistance is stronger, which brings customers greater process flexibility.
Technical advantage 4: Good storage stability - at least 10 months of storage stability, compared with the 6-month shelf life of common photoresists, an increase of more than 50%.
Research and development of next-generation photoresist materials :
After ArF photoresist, Guangweinano has actively deployed in the EUV and DSA fields to develop the next-generation photoresist. For 5 nm resolution fast DSA materials, it has carried out close industry-university-research cooperation with Fudan University to jointly promote technological innovation.
The results of the industry-university-research cooperation include 5 nm resolution fast DSA materials, which are characterized by the ability to quickly form lithography patterns with a resolution of less than 5 nanometers under low temperature conditions.
For the aforementioned photoresists and advanced material products, we have adopted a QC quality management system that meets industry requirements to ensure that all aspects of their production meet the industry and customer requirements.