NAURA Cumulative Shippings.
1) Etching equipment: In 2023, the company's etching equipment revenue was nearly 6 billion yuan. ICP has achieved breakthroughs in various 12-inch technology nodes, and polysilicon and metal etching series ICP equipment has been applied on a large scale. ICP has shipped more than 3,200 cavities in total; CCP has covered multiple key processes in the fields of logic, storage, power semiconductors, etc., with cumulative shipments exceeding 100 cavities; the company's 12-inch TSV can greatly increase the etching rate, reaching the international mainstream level, and has been widely used in domestic mainstream Fab factories and advanced packaging factories. It is the main machine for domestic TSV mass production lines and has a leading market share; dry degumming equipment has been widely recognized by customers and has formed batch sales. 2) Thin film deposition equipment: In 2023, the company's thin film deposition equipment revenue exceeded 6 billion yuan. PVD has achieved full coverage of the metallization process of logic chips and memory chips. The company has launched more than 40 PVD equipment and has shipped more than 3,500 cavities in total. The key technical indicators of CVD have reached the industry-leading level. The company has achieved mass production applications of more than 30 CVD products, with cumulative shipments of more than 1,000 cavities. EPI has the epitaxial growth technology capabilities of various materials such as monocrystalline silicon, polycrystalline silicon, SiC, and GaN. The company has released more than 20 mass-produced epitaxial equipment, with cumulative shipments of more than 1,000 cavities. 3) Vertical furnaces and cleaning equipment: In 2023, the company's vertical furnace and cleaning equipment revenue will exceed 3 billion yuan. In the field of vertical furnaces, the company has achieved full coverage of logic and storage process applications, with cumulative shipments of more than 700 units; in the field of cleaning equipment, the company has achieved full coverage of trough processes, and at the same time, high-end monolithic processes have achieved breakthroughs, with cumulative shipments of more than 1,200 units.