As far as EUV, just follow CETC and Huawei with its new campus in Shanghai:
EUV isn't even the end all be all. There are a million and one things in this bubbling cauldron of growth that is the China semicon landscape right now. Things like packaging, multiple passing schemes, etc. that can extend competiveness up to 3nm without EUV, there are things that can blow the current state of EUV out of the water like SSMB and then there are others like Graphene, Photonics and Quantum that make EUV and the current state of chip production absolutely meaningless.
The key to this is gaining control of China's own market -- the world's largest by wide margin. Replace imports with domestic chips and you have the resources to not only survive but to do anything you want and dominate. Right now, that market is 50% of the global share and is still importing more chips than oil.