Chinese semiconductor thread II

gelgoog

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That said, SMEE has delivered machines for testing and probably even for verification. Despite DUV being viewed as being "old" tech compared to EUV, right now SMEE is the only company that is making a DUV (NXT-2000i equivalent) outside ASML.
Nikon also has DUV scanners with immersion and everything.
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Intel is a longtime user.
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When you see a 7nm Intel processor, that was made with Nikon lithography equipment. Not ASML's.
 
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european_guy

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Sirui Intelligent completed hundreds of millions of yuan in Series B financing, focusing on the semiconductor front-end process equipment track​

Qingdao Sifang Sirui Intelligent Technology Co., Ltd. (referred to as Sirui Intelligence) recently completed hundreds of millions of yuan in Series B financing. This round of financing was jointly led by SAIC Strategic Direct Investment, Shangqi Capital and CDH Investment; well-known investors such as China Merchants Venture Capital, Shanghai Gimpo, Xinding Capital, Sinovation Ventures, Huakong Fund and Qing Venture Capital also participated in the investment; Old shareholders such as Ocean Pine Capital, Haiao Xinke, Xinxin Venture Capital, Hengchuang Investment, and Tongge Venture Capital continue to support the company.

Qingdao Sifang Sirui Intelligent Technology Co., Ltd. was established in 2018 and is headquartered in Qingdao, China, with R&D centers in Beijing and Shanghai. Sirui Intelligent mainly focuses on key semiconductor front-end process equipment. Its products include atomic layer deposition (ALD) equipment and ion implantation (IMP) equipment, which can be widely used in integrated circuits, third-generation semiconductors, new energy, optics, parts coating, etc. Many high-precision fields.

Official news from Sirui Intelligent shows that in 2018, the company completed the acquisition of 100% equity of Beneq in Finland, the birthplace of ALD technology. Sirui Intelligent integrates Beneq's overseas cutting-edge technology research and development resources, carries out domestic and foreign joint research and development and domestic industrialization of ALD technology, and has established a complete ALD product system, covering many leading customers around the world and gaining market leadership in many market segments. competitive position. After promoting the transformation and upgrading of the ALD business, it laid out the ion implantation equipment business and achieved breakthroughs. SIRUI Intelligence uses high-energy ion implanters as the entry point to carry out research and development, solve the problem of "stuck neck" of domestic high-end ion implanters, and gradually complete the layout of a full range of models in the silicon-based and compound semiconductor fields.

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And with this one we now have 3 ion implantation manufacturers in China: Sirui, Kingstone and CETC

Also product range is quite impressive, for instance see here Sirui 8MeV high energy implantation for CIS image sensors

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High energy ion implantation is the high end in terms of technical difficulty.

Although ion implantation has a very high technical entry barrier and until 2018 no Chinese machine existed (the first one was CETC and probably only in a prototype/low volume, lab oriented form), today we have 3 producers that cover all the ranges and all the process nodes up to 28nm included and all 3 are in volume production.

Below 28nm no manufacturer advertise anything, but IMHO this is due to war-time information embargo for nodes below 28nm more than for lack of activity. I would not be surprised if all 3 actors are currently actively developing or even validating sub 28nm advanced solutions.
 

chgough34

Junior Member
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There is a bit of disappointment that the SSA800 hasn't hit SMEE's 2024 products catalog yet. So that probably constitutes "hitting a wall."

That said, SMEE has delivered machines for testing and probably even for verification. Despite DUV being viewed as being "old" tech compared to EUV, right now SMEE is the only company that is making a DUV (NXT-2000i equivalent) outside ASML.

This is hard stuff but having actual systems being tested and being verified on the process line actually means they are clearly a step from smashing through the "wall."
SMEE’s DUVi product is going to be a big bang, it will appear one day and then everyone will be surprised except for us on this site lol
 

tphuang

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Yes, I think it will continue to be less transparent until the turning point where the industry has satisfied enough domestic demand and internal competition forces firms to start competing for outside business.

Chinese HPCs had been shrouded in mystery despite China having some of the fastest if not fastest petaflop plus systems around.

Being transparent at this point does them no good besides bringing about more sanctions.

That said, the official catalog at SMEE should reflect the SA800 at some point in next several years. If not, then we can expect that SMEE encountered issues and temper optimism a bit. Not everything can be fast tracked like etching.

When there are news, stuff will get posted here. Don't waste too much time refreshing those screens

Frankly, SMEE progress really is overhyped at the moment. Status of the EUV project is far more relevant

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has this been posted before?
对上述瓶颈问题,九峰山实验室、华中科技大学组成联合研究团队,支持华中科技大学团队突破“双非离子型光酸协同增强响应的化学放大光刻胶”技术。

该研究通过巧妙的化学结构设计,以两种光敏单元构建“双非离子型光酸协同增强响应的化学放大光刻胶”,最终得到光刻图像形貌与线边缘粗糙度优良、space 图案宽度值正态分布标准差(SD)极小(约为 0.05)、性能优于大多数商用光刻胶。且光刻显影各步骤所需时间完全符合半导体量产制造中对吞吐量和生产效率的需求。

该研究成果有望为光刻制造的共性难题提供明确的方向,同时为 EUV 光刻胶的着力开发做技术储备。
 

tokenanalyst

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Registered Member
High energy ion implantation is the high end in terms of technical difficulty.

Although ion implantation has a very high technical entry barrier and until 2018 no Chinese machine existed (the first one was CETC and probably only in a prototype/low volume, lab oriented form), today we have 3 producers that cover all the ranges and all the process nodes up to 28nm included and all 3 are in volume production.
Exactly, its said the ion implantation is next to lithography in terms of difficulty, back in the day most of China ion implantation industry was focus on solar (Kingstone and mostly CETC), now there are 3 localized companies competing in the integrated circuit ion implantation space in just few years, increasing their products offering from a few products to a whole production lines, now the cover high end IC process, third generation semiconductors and solar.
I have been saying this for years people underestimate how fast things can change with disruptive market changes like US export controls. Like nature, companies are going to try to fill void niches as soon as possible.​
 
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