Progress had been particularly evident in critical segments such as etching and thin-film deposition, where adoption of local equipment had surpassed 40 per cent, thanks to the progress of local manufacturers such as Naura Technology Group and Advanced Micro-Fabrication Equipment.
Oxidation and diffusion furnaces from Naura accounted for more than 60 per cent of the 28nm production lines at
, China’s top foundry. Naura’s order backlog now extended into the first quarter of 2027.
Piotech doubled its share of plasma-enhanced chemical vapour deposition equipment at Yangtze Memory Technology’s 3D NAND production lines, bringing the company’s equipment share to 30 per cent from 15 per cent, according to the report.