Chinese semiconductor thread II

[european_guy]

Nice short video of a moving wafer double stage (in 2023)

https://twitter.com/i/web/status/2001653687899558306

post author says it is an EUV, but we can be skeptical here, anyhow the stage for EUV is not so different from the one for DUV (apart from the fact that EUV is in vacuum, so maglev is mandatory). But the real critical part, the highly complex software control loop that ensures the precision of positioning is the same.

 

[iewgnem]

what is the status of SSMB euv? is that at back burner?

Just need to go back a few pages on this thread.
SSMB is next gen, probably targeting 2030s

STOCHASTIC COOLING ENHANCED STEADY-STATE MICROBUNCHING.​

​

Abstract:​

In this paper, we propose to combine two promising research topics in accelerator physics, i.e., optical stochastic cooling (OSC) and steady-state microbunching (SSMB). Our study shows that such an OSC-SSMB storage ring with a circumference of 50 m and beam energy of several hundred MeVs using present technology can deliver kilowatt radiation at 100 nm wavelength. A more ambitious application of OSC in an SSMB ring can push the radiation wavelength to an even shorter wavelength, such as EUV and soft Xray. Such a powerful compact light source could benefit fundamental science research and industry applications

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[escobar]

https://twitter.com/i/web/status/2001684597558645077

 

[HighGround]

https://twitter.com/i/web/status/2001684597558645077

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A document drafted in 2023 probably means that it's reporting/analyzing 2020-2022 news. 3-5 years is an eternity in this space. It's completely out of date.

 

[olalavn]

Domestic EUV lithography machines will not first be applied to logic chips, but to memory chips. Memory chips also require EUV technology, though with less demanding specifications. So just keep an eye on CXMT’s product lineup.

Incorrect. The first generation of EUV will be for logic chips... those are server chips... then phone chips... DRAM can use DUV until 2029... at which point EUV will be 100% commercialized.

 

[Hyper]

Difficult to know. But these more modern EUV pilots lines date back to 2022 in some documents or earlier. Beijing, Shanghai and Shenzhen with Huawei. Also is highly probably that the hardware is shared between them like for example U-Precision Maglev wafer stages, EUV optical systems, anti-Vibration systems, vacuum systems and so on.

What's the productivity at this point? 50-70 WPH or lower??

 

[Hyper]

Incorrect. The first generation of EUV will be for logic chips... those are server chips... then phone chips... DRAM can use DUV until 2029... at which point EUV will be 100% commercialized.

Not really. 1-gamma node definitely requires EUV.